Method for improving critical current of YBCO thick film
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A thick film and thin film technology, which is applied in the field of pulsed laser deposition and superconducting materials, can solve the problem of low irreversible field of Bi-based superconducting materials, achieve good texture and surface morphology, improve electrical properties, and improve superconducting properties Effect
Inactive Publication Date: 2016-06-22
GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS BEIJNG
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[0004] The first generation of high temperature superconducting tape is Bi 2 Sr 2 Ca 2 Cu 3 o 10 (BSCCO2223), its technology has basically matured and can be mass-produced, but due to the thermally activated magnetic flux movement, the irreversible field of Bi-based superconducting materials is low, and it is impossible to obtain a large critical current density at high temperature and high field (J c )
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specific Embodiment 1
[0032] The YBCO superconducting layer is prepared by laser method, the target material is YBCO target of Φ50×5mm, and the base distance of the target is about 40mm. The target is kept spinning during deposition.
[0033] will carry CeO 2 / YSZ / Y 2 o 3 The NiW metal substrate of the isolation layer is pasted under the stainless steel leader tape, the size of the substrate is 5×10mm, and the sample is placed above the target.
[0034] Close the cavity of the vacuum equipment, and evacuate to 2.5×10 -4 Pa, the substrate temperature is heated to 750°C, and the temperature is read by a built-in thermocouple (715°C measured by an infrared thermometer). After the temperature is stabilized, oxygen is introduced into the cavity to control the oxygen pressure to 20Pa.
[0035] Turn on the laser, select frequency 10Hz, energy density 1.8J / cm 2 , deposit YBCO film on the substrate. Afterwards, increase the temperature of the metal baseband by 10°C at the original temperature and keep...
specific Embodiment 2
[0040] The YBCO superconducting layer is prepared by laser method, the target material is a YBCO target of Φ50×5mm, and the base distance of the target is about 60mm. The target is kept spinning during deposition.
[0041] will carry CeO 2 / YSZ / Y 2 o 3 The NiW metal substrate of the isolation layer is pasted under the stainless steel leader tape, the size of the substrate is 15×10mm, and the sample is placed above the target.
[0042] Close the cavity of the vacuum equipment, and evacuate to 2.5×10 -4 Pa, the substrate temperature is heated to 760°C, and the temperature is read by a built-in thermocouple (725°C measured by an infrared thermometer). After the temperature is stabilized, oxygen is introduced into the cavity to control the oxygen pressure to 30Pa.
[0043] Turn on the laser, select frequency 5Hz, energy density 2.0J / cm 2 , deposit YBCO film on the substrate. Afterwards, increase the temperature of the metal substrate by 10°C at the original temperature and k...
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Abstract
A method for producing a YBCO superconducting layer thick film on a metal baseband substrate comprises the following steps: 1, adopting a metal baseband with an isolating layer as a sample substrate; 2, adopting YBCO as a target material, and controlling the target-substrate distance to be 40-60mm; 3, carrying out vacuum pumping until the vacuum degree in a vacuum cavity is better than 3*10<-4>Pa, heating the metal baseband substrate to 750-770DEG C, and keeping the temperature unchanged; 3, introducing oxygen to the vacuum cavity, controlling the pressure of pure oxygen atmosphere to be 20-30Pa, and keeping the pressure; 4, producing the YBCO film on the metal baseband substrate with the isolating layer through using a pulsed laser deposition (PLD) technology, depositing the YBCO film at a laser frequency of 10-20Hz, heating the metal baseband substrate to make the temperature be 5-10DEG C higher than an original temperature, keeping the temperature, continuously depositing the YBCO film under same conditions after the temperature is stable, and changing a traditional continuous deposition mode to an intermittent deposition mode; and 5, carrying out in situ annealing on the deposited YBCO films in order to produce the YBCO superconducting layer thick film on the metal baseband substrate with an isolating layer. The YBCO film produced by using the above laser method has the advantages of good texture, good surface morphology and high electric performance.
Description
technical field [0001] The invention relates to a continuous preparation method of a thin film, which belongs to the technical field of superconducting materials, in particular to YBa 2 Cu 3 o 7-x (YBCO) coated conductor superconducting layer preparation and pulsed laser deposition (PLD) technical field. Background technique [0002] After 30 years of development, high-temperature superconducting materials are currently changing from the basic research stage to the applied research stage. The research on high-temperature superconducting materials has made major breakthroughs in many aspects such as single crystals, thin films, bulk materials, wires, and coated conductors. , and will gradually be applied in fields such as energy, industry, transportation, medical care, aerospace, national defense and scientific experiments, playing a unique and irreplaceable role. [0003] The application of high-temperature superconductors in strong electricity requires superconducting ma...
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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/28C23C14/08H01L39/24
Inventor 杨坚
Owner GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS BEIJNG
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