An experiment system and an experiment method used for studying dielectric barrier discharge processing of SF[6] gases
A technology of dielectric barrier discharge and experimental system, applied in instruments, color/spectral characteristic measurement, measurement devices, etc., can solve the problem that DBD treatment of SF is not deep enough and not enough to be applied in industrial practice.
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Embodiment 1
[0070] Used to study dielectric barrier discharge treatment SF 6 Gas experimental system includes gas distribution system, SF 6 Gas treatment system, parameter detection system and tail gas treatment system. The gas distribution system includes gas distribution instrument 1, gas pressure reducing valve I2, gas pressure reducing valve II3, SF 6 Gas bottle 4 , background gas bottle 5 and bubbler 6 . The SF 6 The gas processing system includes a dielectric barrier discharge reactor 10 , a voltage regulator 11 and a plasma power source 12 . Described parameter detection system comprises high voltage probe 13, sampling resistor 14, sampling capacitor 15, coaxial cable 16, single pole double throw switch 43, oscilloscope 17, collimating mirror 18, optical fiber 19, optical fiber spectrometer 20, computer 21 and gas chromatograph 25. The tail gas treatment system includes a digital display pressure vacuum gauge 29 , a vacuum pump 30 and an alkaline water absorption tank 32 .
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Embodiment 2
[0100] Used to study dielectric barrier discharge treatment SF 6 Gas experimental system includes gas distribution system, SF 6 Gas treatment system, parameter detection system and tail gas treatment system. The gas distribution system includes gas distribution instrument 1, gas pressure reducing valve I2, gas pressure reducing valve II3, SF 6 Gas bottle 4 , background gas bottle 5 and bubbler 6 . The SF 6 The gas processing system includes a dielectric barrier discharge reactor 10 , a voltage regulator 11 and a plasma power source 12 . Described parameter detection system comprises high voltage probe 13, sampling resistor 14, sampling capacitor 15, coaxial cable 16, single pole double throw switch 43, oscilloscope 17, collimating mirror 18, optical fiber 19, optical fiber spectrometer 20, computer 21 and gas chromatograph 25. The tail gas treatment system includes a digital display pressure vacuum gauge 29 , a vacuum pump 30 and an alkaline water absorption tank 32 .
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Embodiment 3
[0124] Used to study dielectric barrier discharge treatment SF 6 Gas experimental system includes gas distribution system, SF 6 Gas treatment system, parameter detection system and tail gas treatment system. The gas distribution system includes gas distribution instrument 1, gas pressure reducing valve I2, gas pressure reducing valve II3, SF 6 Gas bottle 4 , background gas bottle 5 and bubbler 6 . The SF 6 The gas processing system includes a dielectric barrier discharge reactor 10 , a voltage regulator 11 and a plasma power source 12 . Described parameter detection system comprises high voltage probe 13, sampling resistor 14, sampling capacitor 15, coaxial cable 16, single pole double throw switch 43, oscilloscope 17, collimating mirror 18, optical fiber 19, optical fiber spectrometer 20, computer 21 and gas chromatograph 25. The tail gas treatment system includes a digital display pressure vacuum gauge 29 , a vacuum pump 30 and an alkaline water absorption tank 32 .
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