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M/MOx composite hydrogen resistance coating and preparation method thereof

A composite coating and hydrogen blocking technology, applied in coatings, chemical instruments and methods, metal material coating processes, etc., can solve the problems of high cost, complex preparation process, long time consumption, etc., to improve efficiency and simplify the preparation process. , The effect of improving the bonding force of the membrane substrate

Inactive Publication Date: 2016-07-06
有研科技集团有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the above-mentioned transition layers improve the bonding force between the substrate and the hydrogen barrier coating, processes such as in-situ thermal growth and hot-dip aluminum require high-temperature post-treatment, and the preparation process is complicated, time-consuming, and costly, which has certain limitations.

Method used

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  • M/MOx composite hydrogen resistance coating and preparation method thereof
  • M/MOx composite hydrogen resistance coating and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0027] The transition layer and the hydrogen barrier coating were prepared using conventional sputtering equipment and reactive sputtering combined with negative bias technology.

[0028] 1) The 316L stainless steel substrate was ultrasonically cleaned with acetone and alcohol for 10 minutes respectively, and placed in a vacuum chamber.

[0029] 2) The back vacuum reaches 7×10 -3 After Pa, clean the substrate with a bias voltage, the negative bias voltage is -200V, the Ar pressure is 1Pa, and the cleaning time is 10min.

[0030] 3) The Al transition layer was prepared by DC reactive sputtering combined with negative bias technology, the sputtering current was 10A, the sputtering power was 3300W, the negative bias was -200V, the gas pressure was 1Pa, and the deposition was 15min.

[0031] 4) In situ preparation of Al on the Al transition layer by DC reactive sputtering combined with negative bias technology 2 o 3 Hydrogen barrier coating. Ar / O 2 The ratio is 10 / 1, the gas ...

Embodiment 2

[0034] The transition layer and the hydrogen barrier coating were prepared using conventional sputtering equipment and reactive sputtering combined with negative bias technology.

[0035] 1) The 304 stainless steel substrate was ultrasonically cleaned with acetone and alcohol for 10 minutes respectively, and placed in a vacuum chamber.

[0036] 2) The back vacuum reaches 5×10 -3 After Pa, clean the substrate with a bias voltage, the negative bias voltage is -50V, the Ar pressure is 2Pa, and the cleaning time is 20min.

[0037] 3) The Er transition layer was prepared by radio frequency reactive sputtering combined with negative bias technology, the sputtering power was 1050W, the negative bias was -50V, the air pressure was 0.5Pa, and the deposition was 10min.

[0038] 4) In situ preparation of Er on the Er transition layer by radio frequency reactive sputtering combined with negative bias technology 2 o 3 Hydrogen barrier coating. Ar / O 2 The ratio is 10 / 3, the gas pressur...

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Abstract

The present invention relates to a kind of M / MO x Composite hydrogen barrier coating, including stainless steel substrate and M / MO applied thereon x Composite coating. The transition layer M in the composite coating is Al, zr, Er, Y, Cr, Mn, Fe metal, the hydrogen barrier coating MO x It is the oxide of the transition layer metal. Composite hydrogen-resistant coatings are all prepared by reactive sputtering combined with negative bias technology, and can be a one-layer or multi-layer composite structure. The invention not only can effectively improve the binding force between the coating and the substrate, but also facilitates the improvement of the hydrogen resistance performance of the coating itself.

Description

technical field [0001] The invention relates to a method for improving the hydrogen resistance performance of an oxide hydrogen barrier (tritium) coating and the bonding force with a matrix metal by using deposited metal as a transition layer and a bias voltage technology, and belongs to the technical field of surface engineering. Background technique [0002] Tritium, an isotope of hydrogen, is the main fuel for thermonuclear weapons and controllable thermonuclear reactors, and has important applications in the fields of military nuclear technology and fusion energy. However, due to the small atomic radius and mass of tritium, it has strong penetrability in most metal materials. The leakage of tritium will not only cause the loss of nuclear fuel, but also cause hydrogen embrittlement of metal structural materials, which will affect the mechanical properties of the system. Performance and lifespan have serious negative effects, and even cause pollution to the environment. A...

Claims

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Application Information

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IPC IPC(8): B32B15/04B32B9/04C23C14/34
Inventor 张华李帅何迪杜淼郝雷刘晓鹏王树茂蒋利军
Owner 有研科技集团有限公司
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