M/MOx composite hydrogen resistance coating and preparation method thereof

A composite coating and hydrogen blocking technology, applied in coatings, chemical instruments and methods, metal material coating processes, etc., can solve the problems of high cost, complex preparation process, long time consumption, etc., to improve efficiency and simplify the preparation process. , The effect of improving the bonding force of the membrane substrate

Inactive Publication Date: 2016-07-06
有研科技集团有限公司
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Problems solved by technology

Although the above-mentioned transition layers improve the bonding force between the substrate and the hydrogen barrier coating, processes such as in-situ thermal grow

Method used

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  • M/MOx composite hydrogen resistance coating and preparation method thereof
  • M/MOx composite hydrogen resistance coating and preparation method thereof

Examples

Experimental program
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Example Embodiment

[0026] Example 1:

[0027] The transition layer and the hydrogen barrier coating are prepared by adopting conventional sputtering equipment and adopting reactive sputtering combined with negative bias technology.

[0028] 1) The 316L stainless steel substrate is ultrasonically cleaned with acetone and alcohol for 10 minutes, and then placed in the vacuum chamber.

[0029] 2) The background vacuum reaches 7×10 -3 After Pa, the substrate was cleaned with a bias voltage, the negative bias voltage was -200V, the Ar gas pressure was 1 Pa, and the cleaning time was 10 minutes.

[0030] 3) The Al transition layer was prepared by DC reactive sputtering combined with negative bias technology, the sputtering current was 10A, the sputtering power was 3300W, the negative bias was -200V, the pressure was 1Pa, and the deposition was 15min.

[0031] 4) Using DC reactive sputtering combined with negative bias technology to prepare Al in situ on the Al transition layer 2 O 3 Hydrogen barrier coating. A...

Example Embodiment

[0033] Example 2:

[0034] The transition layer and the hydrogen barrier coating are prepared by adopting conventional sputtering equipment and adopting reactive sputtering combined with negative bias technology.

[0035] 1) The 304 stainless steel substrate is ultrasonically cleaned with acetone and alcohol for 10 minutes, and then placed in the vacuum chamber.

[0036] 2) The background vacuum reaches 5×10 -3 After Pa, clean the substrate with a bias voltage, the negative bias voltage is -50V, the Ar gas pressure is 2 Pa, and the cleaning time is 20 minutes.

[0037] 3) The Er transition layer was prepared by radio frequency reactive sputtering combined with negative bias technology, sputtering power was 1050W, negative bias was -50V, pressure was 0.5Pa, and deposited for 10 minutes.

[0038] 4) Prepare Er in situ on the Er transition layer by radio frequency reactive sputtering combined with negative bias technology 2 O 3 Hydrogen barrier coating. Ar / O 2 The ratio is 10 / 3, the press...

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Abstract

The present invention relates to a kind of M/MO x Composite hydrogen barrier coating, including stainless steel substrate and M/MO applied thereon x Composite coating. The transition layer M in the composite coating is Al, zr, Er, Y, Cr, Mn, Fe metal, the hydrogen barrier coating MO x It is the oxide of the transition layer metal. Composite hydrogen-resistant coatings are all prepared by reactive sputtering combined with negative bias technology, and can be a one-layer or multi-layer composite structure. The invention not only can effectively improve the binding force between the coating and the substrate, but also facilitates the improvement of the hydrogen resistance performance of the coating itself.

Description

technical field [0001] The invention relates to a method for improving the hydrogen resistance performance of an oxide hydrogen barrier (tritium) coating and the bonding force with a matrix metal by using deposited metal as a transition layer and a bias voltage technology, and belongs to the technical field of surface engineering. Background technique [0002] Tritium, an isotope of hydrogen, is the main fuel for thermonuclear weapons and controllable thermonuclear reactors, and has important applications in the fields of military nuclear technology and fusion energy. However, due to the small atomic radius and mass of tritium, it has strong penetrability in most metal materials. The leakage of tritium will not only cause the loss of nuclear fuel, but also cause hydrogen embrittlement of metal structural materials, which will affect the mechanical properties of the system. Performance and lifespan have serious negative effects, and even cause pollution to the environment. A...

Claims

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Application Information

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IPC IPC(8): B32B15/04B32B9/04C23C14/34
Inventor 张华李帅何迪杜淼郝雷刘晓鹏王树茂蒋利军
Owner 有研科技集团有限公司
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