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A method for increasing the coercive force of sintered NdFeB by infiltrating heavy rare earth by magnetron sputtering

A magnetron sputtering, heavy rare earth technology, applied in sputtering coating, inductor/transformer/magnet manufacturing, magnetic objects and other directions, can solve the problems of poor temperature stability, affecting normal use, low Curie temperature, etc. The thickness can be precisely controlled, the utilization rate can be improved, and the waste can be reduced.

Active Publication Date: 2019-01-11
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the Curie temperature of NdFeB sintered permanent magnet material is low, the temperature stability is not good, the magnetic loss is large in the high temperature working environment, and the coercive force deteriorates sharply, which affects normal use.

Method used

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  • A method for increasing the coercive force of sintered NdFeB by infiltrating heavy rare earth by magnetron sputtering

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0042] Example 1 After sputtering a Tb heavy rare earth layer on the surface of a 1.8mm thick 52H magnet, conduct grain boundary diffusion heat treatment

[0043] A commercial magnet 52H is selected, the magnet size is 40mm x 20mm x 2mm. After the magnet has been degreased and derusted, it is put into the magnetron sputtering vacuum chamber, and the vacuum is pumped to 1.0×10 -3 Pa, pass high-purity Ar gas to activate surface ions: adjust the working pressure to 6×10 -2 Pa, anode voltage 150V, anode current 1.0A, activation 5min. Subsequently, a 3 μm Tb heavy rare earth layer was deposited on the surface of the 52H magnet by DC magnetron sputtering: the working pressure was 0.1 Pa, and the target power density of the sputtering target was 5 W / cm 2 , the target head and the horizontal plane are 60°, the target-base distance is 12cm, and the deposition time is 1.5h. Put the magnet deposited with Tb layer into the furnace, and evacuate to (1~3)×10 -3 Pa, slowly heated to 900°...

Embodiment 2

[0047] Example 2 After sputtering a Tb heavy rare earth layer and a Cr barrier layer on the surface of a 4mm thick 42SH magnet, conduct grain boundary diffusion heat treatment

[0048] A commercial magnet 42SH is selected, and the magnet size is 40mm x 20mm x 4mm. After the magnet has been degreased and derusted, it is put into the magnetron sputtering vacuum chamber, and the vacuum is pumped to 1.0×10 -3 Pa, pass high-purity Ar gas to activate surface ions: adjust the working pressure to 6×10 -2 Pa, anode voltage 150V, anode current 1.0A, activation 5min. Subsequently, a 3 μm Tb heavy rare earth layer was deposited on the surface of the 42SH magnet by DC magnetron sputtering: the working pressure was 0.1Pa, and the target power density of the sputtering target was 5W / cm 2 , the target head and the horizontal plane are 60°, the target-base distance is 12cm, and the deposition time is 1.5h. Then deposit a Cr barrier layer of about 1 μm on the surface of the 42SH magnet depos...

Embodiment 3

[0052] Example 3 The surface of a 10mm thick 45H magnet is sputtered with a Dy heavy rare earth layer and then heat-treated by grain boundary diffusion

[0053] Select a commercially available magnet 45H with a magnet size of After the magnet has been degreased and derusted, it is put into the magnetron sputtering vacuum chamber, and the vacuum is pumped to 1.0×10 -3 Pa, pass high-purity Ar gas to activate surface ions: adjust the working pressure to 6×10 -2 Pa, anode voltage 150V, anode current 1.0A, activation 5min. Deposit the Dy heavy rare earth layer on the surface of the 45H magnet by DC magnetron sputtering: the working pressure is adjusted to 0.1Pa, and the target power density of the sputtering target is 5W / cm 2 , the target head is 60° to the horizontal plane, the target-base distance is 12cm, and the deposition time is 5h. Put the magnet into the furnace and evacuate to (1-3)×10 -3 Pa, slowly heat to 900°C, keep warm for 10h, cool to room temperature, heat agai...

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Abstract

The invention discloses a method for diffusing permeation of heavy rare earth through a magnetron sputtering method to improve coercivity of sintered neodymium iron boron.The method includes: (1), dedusting and deoiling a sintered neodymium iron boron workpiece; (2), performing ion activation on the sintered neodymium iron boron workpiece treated; (3), sputtering the sintered neodymium iron boron workpiece treated in the step (2), and depositing a heavy rare earth layer; (4), performing high-temperature thermal diffusion and annealing on the sintered neodymium iron boron workpiece deposited with the heavy rare earth layer.Sintered neodymium iron boron permeated with heavy rare earth is prepared through the magnetron sputtering method, and the method enables the heavy rare earth layer and the sintered neodymium iron boron workpiece to be combined compactly, and is more conducive to heavy rare earth elements to be fully diffused into a magnet to enable sintered neodymium iron boron to be higher in coercivity.

Description

technical field [0001] The invention relates to the technical field of surface treatment of rare earth permanent magnet materials, in particular to a method for increasing the coercive force of sintered NdFeB by infiltrating heavy rare earth by magnetron sputtering. Background technique [0002] Sintered neodymium iron boron (NdFeB) is a third-generation rare earth permanent magnet material, which has the advantages of high coercive force, residual magnetism, and magnetic energy product, and its cost performance is higher than other magnets. However, the Curie temperature of NdFeB sintered permanent magnet material is low, the temperature stability is not good, the magnetic loss is large in the high temperature working environment, and the coercive force deteriorates sharply, which affects the normal use. [0003] The coercive force has a certain correlation with the Curie temperature, and the Curie temperature and temperature stability of sintered NdFeB can be improved by i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/16C23C14/58C23C14/02H01F41/02H01F1/057
CPCC23C14/02C23C14/021C23C14/081C23C14/165C23C14/35C23C14/5806H01F1/057H01F41/0293
Inventor 宋振纶张丽娇郑必长姜建军
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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