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Method for preparing silicon-nitride ceramic substrate through silicon-powder tape casting

A technology for silicon nitride ceramics and silicon powder is applied in the field of silicon powder casting to prepare silicon nitride ceramic substrates. superior effect

Active Publication Date: 2016-08-24
吉林长玉特陶新材料技术股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The above silicon nitride substrate preparation methods have a common feature, that is, silicon nitride powder is used as the raw material, and the cost of silicon nitride powder is high on the one hand, and on the other hand, due to the preparation of silicon nitride powder process, it is easy to introduce some influences that are not easy to determine, resulting in a decrease in product consistency and yield

Method used

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  • Method for preparing silicon-nitride ceramic substrate through silicon-powder tape casting
  • Method for preparing silicon-nitride ceramic substrate through silicon-powder tape casting

Examples

Experimental program
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Effect test

Embodiment 1

[0030] (1) Preparation of cast slurry: ①Weigh silicon powder (d50=4μm), inorganic sintering aid and dispersant according to the ratio; wherein, the inorganic sintering aid is MgO, Lu 2 o 3 and ZrO 2 The mixture (MgO:Lu 2 o 3 :ZrO 2 =2:8:3), the ratio of inorganic sintering aid powder to silicon powder is 1:9; the dispersant is castor oil, and the ratio of dispersant to silicon powder is 1:50; the added weight is inorganic matter (silicon powder , inorganic sintering aids and dispersants) 1.2 times the absolute ethanol-butanone azeotrope, with silicon nitride balls as the ball milling medium, mixed ball milling for 20 hours; Type plasticizer; Wherein, plasticizer is triethylene glycol diisocaprylate, and the ratio of plasticizer to silicon powder is 1:8; Adhesive is polyvinyl butyral, and the ratio of adhesive to silicon powder 1:8; mixed ball milling again for 24 hours; ③ the slurry obtained after ball milling was defoamed under the condition of vacuum degree of 0.1Pa to ...

Embodiment 2

[0033] (1) Preparation of cast slurry: ①Weigh silicon powder (d50=4μm), inorganic sintering aid and dispersant according to the ratio; wherein, the inorganic sintering aid is MgO, Lu 2 o 3 and ZrO 2 The mixture (MgO:Lu 2 o 3 :ZrO 2 =2:8:3), the ratio of inorganic sintering aid powder to silicon powder is 1:9; the dispersant is castor oil, and the ratio of dispersant to silicon powder is 1:50; the added weight is inorganic matter (silicon powder , inorganic sintering aids and dispersants) 1.2 times the absolute ethanol-butanone azeotrope, with silicon nitride balls as the ball milling medium, mixed ball milling for 20 hours; Type plasticizer; Wherein, plasticizer is triethylene glycol diisocaprylate, and the ratio of plasticizer to silicon powder is 1:8; Adhesive is polyvinyl butyral, and the ratio of adhesive to silicon powder 1:8; mixed again and ball milled for 24 hours; ③The slurry obtained after ball milling was defoamed under the condition of vacuum degree of 0.1 Pa ...

Embodiment 3

[0037] (1) Preparation of cast slurry: ①Weigh silicon powder (d50=8μm), inorganic sintering aid and dispersant according to the proportion. Among them, the inorganic sintering aids are MgO, Gd 2 o 3 and ZrO 2 The mixture (MgO:Lu 2 o 3 :ZrO 2 =2:8:3), the ratio of inorganic sintering aid powder to silicon powder is 1:9; the dispersant is castor oil, and the ratio of dispersant to silicon powder is 1:50. Add anhydrous ethanol-butanone azeotrope whose weight is 1.5 times of inorganic matter (silicon powder, inorganic sintering aid and dispersant), use silicon nitride balls as ball milling medium, and mix ball milling for 20 hours; Adhesive and environment-friendly plasticizer are added to the material; among them, the plasticizer is triethylene glycol di-n-heptanoate, and the ratio of plasticizer to silicon powder is 1:10; the adhesive is polyvinyl butyral, The ratio of adhesive to silicon powder is 1:10; mix and ball mill again for 24 hours; ③ defoam the slurry obtained af...

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Abstract

The invention discloses a method for preparing a silicon-nitride ceramic substrate through silicon-powder tape casting, and belongs to the technical field of insulation substrates. The method includes the steps that silicon powder and an inorganic burning-assisting additive serve as raw materials, castor oil serves as a dispersing agent, and polyvinyl butyral serves as a binding agent; according to the chemical state and the particle size of the surface of the silicon powder, a plasticizer capable of allowing the silicon powder to be subjected to tape casting is added, and a large-area green blank which is adjustable in thickness, smooth in surface and free of crack and pore is prepared; the green blank is subjected to rubber discharging to be sintered at the high temperature, and the silicon-nitride ceramic substrate with the heat conductivity larger than 50 W.m<-1>.K<-1>, the bending strength larger than 600 MPa and the fracture toughness larger than 8 MPa.m<1 / 2>is prepared.

Description

technical field [0001] The invention belongs to the technical field of insulating substrates, in particular to a method for preparing a silicon nitride ceramic substrate by casting silicon powder. Background technique [0002] In recent years, high-voltage, high-power semiconductor modules and ultra-high-power LED lighting have been increasingly used in various industrial fields, and ceramic materials are widely used for insulating substrates for mounting power semiconductor modules. At present, the insulating substrate materials widely used in the field of power modules are mainly alumina and aluminum nitride substrates. Among them, the alumina substrate has the advantage of low cost, but low mechanical properties and thermal conductivity, and is often used in modules with low power. Aluminum nitride substrates have high thermal conductivity and are often used in higher power modules. [0003] However, as the power of the semiconductor module increases, the operating curr...

Claims

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Application Information

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IPC IPC(8): C04B35/591C04B35/622
CPCC04B35/591C04B35/622C04B2235/658
Inventor 黄荣厦叶顺达吴有亮林华泰
Owner 吉林长玉特陶新材料技术股份有限公司
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