Zinc oxide pressure sensitive resistor

A piezoresistor and zinc oxide technology, which is applied to piezoresistor cores, piezoresistors, resistors, etc., can solve the problems of silver consumption, high production cost, and large ohmic contact resistance, so as to improve the flow capacity , reduce the effect of Joule heat

Inactive Publication Date: 2016-08-31
SUZHOU MIMENG INTELLIGENT EQUIP TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] 1) Since silver and zinc oxide ceramics are mismatched in terms of mechanical properties and electrical properties, it will cause two problems. First, the bonding force between the electrode layer and zinc oxide ceramics is very poor, generally lower than 15N. The middle electrode layer is easy to fall off, the reliability of the device is poor, and the life is short; second, the ohmic contact resistance is large, generally greater than several ohms, and when the surge current passes through such a large ohmic contact resistance, the heat generated is correspondingly large. It is easy to burn the electrode layer;
[0005] 2) Since the electrode lead wire is a straight guide wire, the current is mainly concentrated at the line contact between the guide wire and the electrode film layer, the current density distribution is extremely uneven, and the strong surge current can easily burn through the electrode layer locally, resulting in resistance device is permanently damaged;
[0006] 3) In order to prevent the electrode layer from being burned, the thickness of the silver electrode layer has to reach tens of microns or even hundreds of microns, which requires a large amount of expensive silver consumption and high production costs
[0007] 4) The silver paste for silk screen printing on the electrode layer needs high-temperature sintering in a tunnel kiln, which consumes a lot of energy and causes pollution in the process; there are also prohibited substances such as lead in the silver paste, and the product does not meet the RoSH standard

Method used

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preparation example Construction

[0034] Such as image 3 Shown, according to this preparation method, comprise the steps:

[0035] a) Provide a zinc oxide ceramic substrate.

[0036] The zinc oxide ceramic substrate 1 can be a commercially available zinc oxide ceramic substrate generally used to prepare zinc oxide varistors, or a zinc oxide ceramic substrate prepared by the method in the prior art.

[0037] b) setting an electrode layer on the surface of the zinc oxide ceramic substrate.

[0038] When setting the electrode layer 2, it can be as figure 1 As shown, the transition layer 21 , the barrier layer 22 , and the welding layer 23 are sputtered sequentially on both sides of the zinc oxide ceramic substrate 1 ; only the transition layer 21 and the welding layer 23 can also be sputtered.

[0039] Regarding the specific materials and film thicknesses of the transition layer 21 , the barrier layer 22 , and the soldering layer 23 , refer to the above description for the resistor, and details will not be re...

Embodiment 1

[0058] In this embodiment, a three-layer structure electrode layer is prepared by sputtering on the surface of a zinc oxide varistor ceramic chip whose diameter is Φ10mm and thickness is 2mm and whose type is 10471K. Wherein, the bottom transition layer is made of chrome, the intermediate barrier layer is made of nickel-copper alloy, and the surface welding layer is made of silver.

[0059] In order to remove impurities on the surface of the zinc oxide ceramic substrate, put the zinc oxide ceramic substrate into a ball mill for rolling washing for 30 minutes, then ultrasonically clean it in tap water and deionized water for 20 minutes respectively, and dry it in an oven at 120°C. Let dry for 20 minutes.

[0060] Put the cleaned and dried zinc oxide ceramic substrate into the special mask fixture, and then install the mask fixture on the workpiece holder; send the workpiece holder into the multi-target sputtering equipment, and vacuumize the equipment cavity , so that the vacu...

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Abstract

The invention discloses a zinc oxide pressure sensitive resistor which comprises a zinc oxide ceramic substrate, an electrode layer and an electrode lead, wherein the electrode layer is arranged on the surface of the zinc oxide ceramic substrate; the electrode lead is arranged on the electrode layer; the electrode layer comprises a transition layer which is connected with the zinc oxide ceramic substrate and a welded layer positioned on the outer side of the transition layer; the transition layer is made of nickel, chromium, titanium, aluminum, copper or the alloy of the elements; the welded layer is made of gold, silver, copper or the alloy of the elements.

Description

technical field [0001] The invention relates to the preparation technology of zinc oxide piezoresistors. Background technique [0002] Zinc oxide varistors are based on zinc oxide powder, doped with metal oxides in different proportions and sintered at high temperature into an embryo body, covered with an electrode layer on the surface of the embryo body, and then welded electrode leads. It includes zinc oxide There are three parts: the base ceramic body, the electrode layer arranged on the surface of the ceramic, and the electrode lead welded on the surface of the electrode layer. The electrode layer is used to make ohmic contact with the ceramic, and the lead is used to lead out the electrode for connection with the circuit. [0003] As a varistor, the contact point between the electrode layer and the electrode lead wire needs to withstand the surge current of thousands or even tens of thousands of amperes in an instant, which puts forward strict requirements on the elec...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01C7/102H01C1/144H01C7/112
CPCH01C7/102H01C1/144H01C7/112
Inventor 叶文超
Owner SUZHOU MIMENG INTELLIGENT EQUIP TECH CO LTD
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