A device and method for STC vaporization and hydrogen mixing

Abstract

The invention discloses a device and method for STC vaporization and hydrogen mixing. The device comprises a vaporizer, which consists of a liquid STC outlet, a hydrogen inlet, a filler section, an STC feed port, a demister and a mixed gas outlet. The liquid STC outlet is connected to a heat exchanger through circulating pumps, and the outlet of the heat exchanger is connected to the STC feed port. The device also includes an STC feed pipe, which is connected to the STC feed port. The device and method provided by the invention can achieve efficient, stable and uniform vaporization of STC and mixing of vaporized STC with H2 simultaneously, and have the advantages of low control difficulty, large operating flexibility, low requirement for heat source, stable vaporization rate, high thermal energy utilization efficiency, and uniform mixing with hydrogen and large proportion adjustment range, etc.

Description

Technical field [0001] The present invention relates to an STC vaporization and hydrogen mixing unit in a cold hydrogenation device, in particular to a device and method for STC vaporization and hydrogen mixing, which can greatly reduce the STC vaporization temperature. Background technique [0002] The cold hydrogenation device is a process in which hydrogen and STC (silicon tetrachloride) are mixed and reacted with silicon powder to produce TCS (trichlorosilane). The reaction is completed at >500°C and >2MPa, which requires the vaporization feed pressure of STC and hydrogen to be >2MPa. The device must be equipped with an STC and hydrogen vaporization system. An efficient and stable vaporization method can ensure the stable operation of the cold hydrogenation unit and a high reaction conversion rate. Under the operating pressure, the boiling point of STC is >194°C. To complete the vaporization of STC, the heating source temperature must be greater than the boiling...

AI Technical Summary

Problems solved by technology

This method has a long process and complex equipment (including natural gas combustion furnace, heat transfer oil circulation pump, heat transfer oil expansion tank, heat transfer oil storage tank, heat transfer oil light component condenser, etc.), complicated operation and difficult maintenance, and heat transfer oil has great environmental pollution , if the heat transfer oil leaks into the system, it will cause great pollution to the entire cold hydrogenation system, and it is difficult to remove

At the same time, the construction cost and maintenance cost are relatively high

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