Light-emitting diode epitaxial structure with pn-doped quantum barrier and preparation method thereof
A technology of light-emitting diodes and quantum barriers, applied in semiconductor devices, electrical components, circuits, etc., can solve the problems of InGaN quantum well band tilt, low internal quantum efficiency, and large GaN lattice mismatch, so as to increase internal quantum efficiency , reduce the electric field strength, increase the effect of overlapping probability
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[0039] The present invention will be further described below in conjunction with the accompanying drawings and embodiments, but is not limited thereto.
[0040] The following is only as an example, a light emitting diode epitaxial structure with PN doped quantum barriers
[0041] like figure 1As shown, the light-emitting diode is sequentially composed of sapphire substrate 1, GaN nucleation layer 2, unintentionally doped GaN layer 3, N-type GaN conductive layer 4, multi-quantum well active region 5 and P-type InGaN from bottom to top. conductive layer6. From bottom to top, it includes sapphire substrate, GaN buffer layer, N-type GaN conductive layer, multi-quantum well active region and P-type GaN conductive layer. The quantum well layers and quantum barrier layers in the multi-quantum well active region can be arranged alternately periodically (The order is adjustable); the quantum barrier layer is composed of a P-type doped quantum barrier and an N-type doped quantum barri...
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