Polycrystalline silicon ingot casting method for lowering oxygen content at bottom of polycrystalline silicon ingot
A polycrystalline silicon ingot furnace and polycrystalline silicon technology, which are applied in the growth of polycrystalline materials, chemical instruments and methods, crystal growth, etc., can solve the problem that the quality of the ingot products is greatly affected, the gas in the crucible is difficult to be eliminated, and the oxygen content of the ingot products is high. problems, to achieve the effect of easy control of the coating process, quality assurance, and good heating effect
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Embodiment 1
[0078] Such as figure 1A polysilicon ingot method for reducing the oxygen content at the bottom of the polysilicon ingot is shown, comprising the following steps:
[0079] Step 1, preparation of the coating on the bottom of the crucible, the process is as follows:
[0080] Step 101, preparation of coating spraying liquid: uniformly mixing organic binder, deionized water and boron nitride at a mass ratio of 1:2-2.5:0.8-1.2 to obtain coating spraying liquid;
[0081] Step 102, spraying: use spraying equipment to evenly spray the coating spray liquid described in step 101 on the inner bottom surface of the crucible 1, and the inner bottom surface of the crucible 1 is 1 m 2 The mass of boron nitride contained in the coating spray liquid sprayed in the area is 100g-150g;
[0082] The crucible 1 is a quartz crucible for polycrystalline silicon ingot furnace 9;
[0083] Step 103, drying: place the crucible 1 in step 102 horizontally in the drying equipment, and use the drying equi...
Embodiment 2
[0176] In this example, the difference from Example 1 is that in step 101, the organic binder, deionized water and boron nitride are uniformly mixed at a mass ratio of 1:2:0.8 to obtain a coating spray solution; the organic binder The agent is a silicone adhesive; when spraying in step 102, the inner bottom surface of the crucible 1 is 1m 2 The mass of boron nitride contained in the coating spray liquid sprayed in the area is 100g; when drying in step 103, the drying equipment is used to spray on the inner bottom surface of the crucible 1 at a temperature of 80°C The coating spray liquid is dried, and the crucible 1 is heated to 80° C. by the drying equipment, and then kept warm until the coating spray liquid sprayed on the inner bottom surface of the crucible 1 is dried; the steps The preheating time in the third step is 4h and T1=1285°C, P1=100kW; T2=1400°C in step 401, T3=1560°C in step 402, t=20min in step 403, P2=45kW; Q1=650mbar in step 4 ; In the first step, the holdin...
Embodiment 3
[0185] In this example, the difference from Example 1 is that in step 101, the organic binder, deionized water and boron nitride are uniformly mixed in a mass ratio of 1:2.5:0.8 to obtain a coating spray solution; the organic binder The agent is an epoxy adhesive; when spraying in step 102, the inner bottom surface of the crucible 1 is 1m 2 The mass of boron nitride contained in the coating spray liquid sprayed in the area is 130g; when drying in step 103, the drying equipment is used to spray on the inner bottom surface of the crucible 1 at a temperature of 100°C Dry the coating spray liquid, and first use the drying equipment to heat the crucible 1 to 100°C, and then keep it warm until the coating spray liquid sprayed on the inner bottom surface of the crucible 1 is dried; step The preheating time in the third step is 6h and T1=1125°C, P1=50kW; T2=1350°C in step 401, T3=1540°C in step 402, t=40min in step 403, P2=25kW; Q1=550mbar in step 4 ; In the first step, the holding t...
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