Graphite sheet and metal layer composed thermally conductive sheet and its composing method

A metal composite and graphite sheet technology, which is applied in semiconductor devices, semiconductor/solid-state device manufacturing, semiconductor/solid-state device components, etc., can solve the problems of low production efficiency, unsatisfactory longitudinal thermal conductivity, and unsatisfactory thermal conductivity And other issues

Pending Publication Date: 2017-01-11
SHENZHEN XINHENGKUN TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The commonly used method in the industry to increase the thickness of graphite sheets is to glue multiple layers of graphite sheets together. This method is still not ideal for improving thermal conductivity.
It was also proposed to improve the longitudinal thermal conductivity by combining graphite flakes with metal, and a method for preparing metal coatings and graphite composites in the plating solution was

Method used

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  • Graphite sheet and metal layer composed thermally conductive sheet and its composing method
  • Graphite sheet and metal layer composed thermally conductive sheet and its composing method

Examples

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Embodiment 1

[0035] Such as figure 1 As shown, a thermally conductive sheet composed of a graphite sheet and a metal layer in this embodiment has a first graphite sheet layer 01, and a first metal deposition layer 02 on the first graphite sheet layer 01 is located on the first metal deposition layer. 02 is composed of a metal sheet layer 03 (thermal diffusion layer); the first metal deposition layer 02 is formed by the accumulation of metal particles on the surface of the first graphite sheet layer 01. The deposition in this implementation is physical vapor deposition (PVD), In terms of current technology, PVD technology is more environmentally friendly than other deposition technologies, especially compared to electroplating or electroless plating. With the advancement of technology, we have reason to believe that the optional deposition based on the present invention The technology is not limited to the PVD method; this is the embodiment where the metal sheet layer 03 and the first metal d...

Embodiment 2

[0038] Such as figure 2 As shown, viewed from bottom to top, a thermally conductive sheet composed of a graphite sheet and a metal layer in this embodiment has a first graphite sheet layer 01, and a first metal deposition layer 02 on the first graphite sheet layer 01 is located Another metal deposition layer on the first metal deposition layer 02 is the second metal deposition layer 04, and another graphite sheet located on the second metal deposition layer 04 is the second metal deposition layer 05. In this embodiment, the first metal deposition layer 02 and the second metal deposition layer 04 are the same metal deposition layer, and both are aluminum deposition layers with a thickness of 10 μm. More specifically, after the first metal deposition layer 02 and the second metal deposition layer 04 are aligned, a pressure of 20Mpa generated between them is placed in a temperature environment of 600°C for 10 minutes. This embodiment also At the same time, nitrogen is filled in ...

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Abstract

The invention provides a graphite sheet and metal layer composed thermally conductive sheet and its composing method. According to one embodiment of the invention, through a PVD aluminum deposition layer, the composition of a graphite sheet and other metal layers becomes possible so as to solve the difficulty with increasing the thickness of graphite sheet and thermally-conductive sheet and the problem of low thermal conductivity in the thickness direction. Based on these ideas, the invention aims to improve the overall heat capacity of the thermally conductive sheet and the comprehensive thermal conductivity in the thickness direction. The thermally conductive sheet of the invention can replace the product structure characterized by the adhesion of adhesive layers among multiple graphite sheet layers or between a graphite sheet and metal. Based on the prior art, the present invention combines the PVD aluminum plating technique and the metal hot-press diffusion method. Compared with the pure use of CVD or liquid plating method, the method of the invention is more efficient to obtain a composite metal layer with the same thickness. In addition, the once hard-to-obtain composite thickness and composite structure in the prior art can be more likely to be achieved. The composing method resolves the problem of how to accumulate composite metal layers with designated thicknesses and avoids the inherent defects of CVD and the liquid plating method.

Description

Technical field [0001] The invention relates to the field of thermal conductive materials composed of graphite sheets, belonging to a layered body, suitable for heat conduction and heat dissipation applications of electronic components, and in particular to a thermal conductive sheet composited by graphite sheets and metal layers and a composite method thereof. Background technique [0002] As the thermal conductivity of synthetic graphite flakes is much higher than that of natural graphite flakes, they are widely used in the electronics industry. However, the thermal conductivity of the synthetic graphite sheet in the longitudinal direction (thickness direction) is low, which restricts the improvement of the heat conduction effect, which has always been a problem that the industry expects to solve. In order to improve the thermal conductivity, in addition to increasing the longitudinal thermal conductivity, there is a more feasible way to increase the thickness of the graphite s...

Claims

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Application Information

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IPC IPC(8): H01L23/373H01L21/48
CPCH01L23/3735H01L21/4882H01L23/3736H01L23/3738
Inventor 吴志乐
Owner SHENZHEN XINHENGKUN TECH
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