Integrated thin-film narrowband band-stop filter and design method thereof
A band-stop filter, thin-film technology, applied in waveguide-type devices, electrical components, circuits, etc., can solve the problems of single suppression frequency band and complex device design, and achieve the effect of non-single frequency band, simple design, and reduced device volume.
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[0037] The present invention will be further described in conjunction with the accompanying drawings and embodiments.
[0038] Create a new HFSS project and establish a coplanar waveguide model, such as image 3 shown. Through simulation optimization, the coplanar waveguide parameters are determined so that its characteristic impedance is 50Ω, which meets the impedance matching condition. Among them, the substrate is a single crystal Si substrate (relative permittivity ε r =11.9), the thickness is 500um; the metal material of the coplanar waveguide layer is Cu with a length of 4000um and a thickness of 2um, the width of the signal line in the middle is W=100um, the width of the ground lines on both sides is G=500um, and the gap between the signal line and the ground line is 55um .
[0039] Through SiO on the designed coplanar waveguide transmission line 2 Layer insulation, integrated CoNbZr alloy film. Its model structure is as Figure 4 As shown, the cross-sectional dia...
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