Four-wavelength output semiconductor laser device and preparation method thereof
A semiconductor and laser technology, applied in the field of four-wavelength output semiconductor lasers and their preparation, can solve problems such as inability to transmit signals, and achieve the effects of strong intracavity light field, improved stability and convenience, and improved energy consumption
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[0086] The invention also discloses a method for preparing a tunable monolithic integrated four-wavelength output semiconductor optical parametric oscillation laser, which includes the following steps:
[0087] Step 1: preparing a GaAs substrate;
[0088] Step 2: On the GaAs substrate, sequentially form an N-type GaAs buffer layer, an N-type AlGaAs / GaAs lower DBR (Distributed Bragg Reflector, a distributed Bragg reflector), an N-type GaAs third lower matching layer, and an N-type AlGaAs second Lower matching layer, N-type GaAs first lower matching layer, AlGaAs lower waveguide layer, InGaAs multi-quantum well active region, AlGaAs upper waveguide layer, P-type GaAs first upper matching layer, P-type AlGaAs second upper matching layer, P Type GaAs third upper matching layer, P-type AlGaAs / GaAs upper DBR, P-type GaAs contact layer.
[0089] Step 3: Etching downward from the P-type GaAs contact layer by using photolithography technology and etching technology, and the etching de...
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