A kind of bi with preferred orientation of (012) crystal plane 1-x yb x fe 0.98 mn 0.02 o 3 Ferroelectric thin film and preparation method thereof
A technology of preferential orientation and ferroelectric thin film, applied in the direction of coating, etc., can solve the problem of reducing BFO thin film, achieve good uniformity, good dielectric stability and ferroelectric performance, and reduce the leakage current density
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Embodiment 1
[0031] 1) Clean the surface of the FTO / glass substrate with detergent, acetone, and absolute ethanol in sequence, and seal it in absolute ethanol for later use;
[0032] 2) Bi(NO 3 ) 3 ·5H 2 O (5% excess), Yb (NO 3 ) 3 ·6H 2 O, Fe(NO 3 ) 3 9H 2 O, C 6 h 9 MnO 6 2H 2 O as a raw material, according to the molar ratio of 0.97:0.08:0.98:0.02 (x=0.08) was added to ethylene glycol methyl ether, stirred for 30 minutes until completely dissolved, then added acetic anhydride and stirred for 90 minutes to obtain a total concentration of metal ions of 0.3mol / L of homogeneously mixed precursor liquid, wherein the volume ratio of ethylene glycol methyl ether and acetic anhydride is 3:1;
[0033] 3) Take out the FTO / glass substrate sealed in absolute ethanol in step 1, wash it with deionized water and dry it, and then irradiate it with an ultraviolet light irradiation instrument for 35 minutes to promote the good spreading of the precursor solution on the FTO / glass substrate; ...
Embodiment 2
[0037] 1) Clean the surface of the FTO / glass substrate with detergent, acetone, and absolute ethanol in sequence, and seal it in absolute ethanol for later use;
[0038] 2) Bi(NO 3 ) 3 ·5H 2 O (5% excess), Yb (NO 3 ) 3 ·6H 2 O, Fe(NO 3 ) 3 9H 2 O, C 6 h 9 MnO 6 2H 2 O as a raw material, according to the molar ratio of 0.96:0.09:0.98:0.02 (x=0.09) was added to ethylene glycol methyl ether, stirred for 30 minutes until completely dissolved, then added acetic anhydride and stirred for 90 minutes to obtain a total concentration of metal ions of 0.3mol / L of homogeneously mixed precursor liquid, wherein the volume ratio of ethylene glycol methyl ether and acetic anhydride is 3:1;
[0039] 3) Take out the FTO / glass substrate sealed in absolute ethanol in step 1, wash it with deionized water and dry it, and then irradiate it with an ultraviolet light irradiation instrument for 35 minutes to promote the good spreading of the precursor solution on the FTO / glass substrate; ...
Embodiment 3
[0043] 1) Clean the surface of the FTO / glass substrate with detergent, acetone, and absolute ethanol in sequence, and seal it in absolute ethanol for later use;
[0044] 2) Bi(NO 3 ) 3 ·5H 2 O (5% excess), Yb (NO 3 ) 3 ·6H 2 O, Fe(NO 3 ) 3 9H 2 O, C 6 h 9 MnO 6 2H 2 O as a raw material, according to the molar ratio of 0.95:0.10:0.98:0.02 (x=0.10) was added to ethylene glycol methyl ether, stirred for 30 minutes until completely dissolved, then added acetic anhydride and stirred for 90 minutes to obtain a total concentration of metal ions of 0.3mol / L of homogeneously mixed precursor liquid, wherein the volume ratio of ethylene glycol methyl ether and acetic anhydride is 3:1;
[0045] 3) Take out the FTO / glass substrate sealed in absolute ethanol in step 1, wash it with deionized water and dry it, and then irradiate it with an ultraviolet light irradiation instrument for 35 minutes to promote the good spreading of the precursor solution on the FTO / glass substrate; ...
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