Anti-electromagnetic interference resistive memory and preparation method thereof

An anti-electromagnetic interference and resistive memory technology, applied in the field of microelectronics, can solve the problems of polluting the surrounding environment, accelerating waste of electronic devices, and detrimental to human health, and achieves the effects of simple process, efficient electromagnetic shielding, and excellent electrical conductivity.
CN106571424BActive Publication Date: 2019-09-24GRIMAT ENG INST CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
GRIMAT ENG INST CO LTD
Publication Date
2019-09-24

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Abstract

The invention discloses an anti-electromagnetic interference resistive memory and a preparation method thereof, which belong to the technical field of microelectronics. The resistive variable memory is a sandwich structure consisting of three layers of thin films, including a bottom electrode layer, a resistive variable functional layer and a top electrode layer, and the bottom electrode and top electrode layer are made of electromagnetic shielding material Ti 3 C 2 ene thin film, the resistive switching functional layer is an oxide material. The invention also discloses a preparation method of the resistive variable memory which is resistant to electromagnetic interference. The present invention selects Ti which is conductive, highly efficient electromagnetic shielding, and cheap and easy to obtain. 3 C 2 The ene thin film is used as an electrode material, and the resistive variable memory prepared has the advantages of light weight, high strength, and simple process, and meets the demand for portable and wearable electronic devices.
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Description

technical field

[0001] The invention belongs to the technical field of microelectronics, and in particular relates to an anti-electromagnetic interference resistive memory and a preparation method thereof. Background technique

[0002] Electronic devices such as mobile phones and computers are becoming more and more portable and intelligent, and electronic components are running faster and faster. In the process of transmitting signals and utilizing electric energy of these electronic devices, electromagnetic waves will cause electromagnetic interference to electronic components, affecting the performance and service life of the equipment, accelerating the generation of waste electronic devices, polluting the surrounding environment, and detrimental to human health. An effective solution is to use effective electromagnetic shielding materials, on the one hand to reduce ineffective electromagnetic emissions, and on the other hand to protect devices from external signal interf...

Claims

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