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Sapphire grinding fluid

A technology of grinding fluid and sapphire, applied in the field of grinding fluid, can solve the problems of poor dispersion effect of dispersant, uneven dispersion of liquid film, short cycle life, etc., and achieve stable suspension, improve grinding efficiency and long cycle life. Effect

Inactive Publication Date: 2017-04-26
东莞市淦宏信息科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The dispersion effect of the dispersant is poor, it is easy to precipitate, the grinding efficiency is not high, and the cycle life is short
And in the grinding process, the liquid film on the grinding disc is not uniformly dispersed, which can easily cause scratches on the wafer, and the yield rate is low, so it is necessary to improve

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0011] A kind of sapphire grinding liquid, according to the total weight percentage of grinding liquid, sapphire grinding liquid is made up of 20~30% grinding agent, 10~15% suspending agent, 5~10% cutting agent, 3~5% accelerator and surplus water, Its pH value is 7-8.

[0012] Abrasives, including two kinds of boron carbide, silicon carbide, nano-sized zirconia or corundum, the weight ratio is 1:1.

[0013] Suspending agent, according to the percentage by weight of each component in the suspending agent, 20-30% mica powder, 10-15% ethyl acetate, 3-5% ethylene glycol distearate, 5- 10% epoxy resin, 10-15% octadecylsilane bonded silica gel, and the balance is mineral oil.

[0014] Cutting agent, according to the weight percentage of each component in the cutting agent, 5-10% polyurethane, 5-10% disodium edetate, 1-3% polymer surface penetration agent and 1 to 3% organosiloxane foam suppressor, and the balance is methyl silicone oil.

[0015] The accelerator, according to the ...

Embodiment 2

[0018] A kind of sapphire grinding liquid, according to the total weight percentage of grinding liquid, sapphire grinding liquid is made up of 22~24% grinding agent, 11~13% suspending agent, 6~7% cutting agent, 3~5% accelerator and surplus water, Its pH value is 7-8.

[0019] The grinding agent comprises 10-20% of boron carbide and 20-30% of nano-sized zirconia according to the weight percentage of each component in the grinding agent, and the balance is corundum.

[0020] Suspending agent, according to the percentage by weight of each component in the suspending agent, 20-22% mica powder, 10-11% ethyl acetate, 3-5% ethylene glycol distearate, 5- 6% epoxy resin, 10-11% octadecylsilane bonded silica gel, and the balance is mineral oil.

[0021] Cutting agent, according to the weight percentage of each component in the cutting agent, 5-7% polyurethane, 5-6% disodium edetate, 1-2% polymer surface penetration agent and 1-2% organosiloxane foam suppressor, and the balance is meth...

Embodiment 3

[0025] A kind of sapphire grinding liquid, according to the total weight percentage of grinding liquid, sapphire grinding liquid is made up of 26~28% grinding agent, 13~15% suspending agent, 6~8% cutting agent, 3~5% accelerator and surplus water, Its pH value is 7-8.

[0026] The grinding agent comprises 10-20% of boron carbide and 20-30% of nano-sized zirconia according to the weight percentage of each component in the grinding agent, and the balance is corundum.

[0027] Suspending agent, according to the percentage by weight of each component in the suspending agent, 28-29% mica powder, 13-14% ethyl acetate, 4-5% ethylene glycol distearate, 8- 9% epoxy resin, 12-13% octadecylsilane bonded silica gel, and the balance is mineral oil.

[0028] Cutting agent, according to the weight percentage of each component in the cutting agent, 7-8% polyurethane, 6-7% disodium edetate, 1-3% polymer surface penetration agent and 1 to 3% organosiloxane foam suppressor, and the balance is m...

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Abstract

The invention discloses a sapphire grinding fluid. The sapphire grinding fluid is prepared from, by weight, 20-30% of grinding agent, 10-15% of suspending agent, 5-10% of cutting agent, 3-5% of accelerating agent and the balance water, the pH value is 7-8. The grinding fluid is uniform in dispersion, the grinding agent is stable in suspension, in the grinding process, the grinding agent is not easy to deposit at the bottom of a machine when recycled, a grinding fluid film can be well attached to a grinding disc to prevent scratches caused by direct contact of a wafer and the grinding disc, the grinding efficiency is improved, the rate of good products obtained after grinding is higher, the grinding fluid is not easy to throw away due to extremely high rotary speed, at the same time, the removal rate of the grinding fluid is high, and the service lifecycle is long.

Description

technical field [0001] The invention relates to the technical field of grinding fluid, in particular to a sapphire grinding fluid. Background technique [0002] Grinding of hard materials such as sapphire is carried out by grinding discs. The grinding process needs to continuously inject grinding fluid into the grinding disc. The quality of the grinding fluid is the main factor affecting the grinding effect. At present, the abrasive liquid used for grinding sapphire mainly uses large particle boron carbide, silicon carbide or diamond powder as the abrasive, and then adds a certain proportion of water and dispersant. The dispersion effect of the dispersant is poor, it is easy to precipitate, the grinding efficiency is not high, and the cycle life is short. And in the grinding process, the liquid film on the grinding disc is not evenly dispersed, which easily causes scratches on the wafer, and the yield rate is low, so it is necessary to improve it. Contents of the inventio...

Claims

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Application Information

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IPC IPC(8): C09G1/02C09K3/14
CPCC09G1/02C09K3/1463
Inventor 简顺年
Owner 东莞市淦宏信息科技有限公司
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