Vacuum arc ion coating method
A vacuum arc and ion coating technology, applied in vacuum evaporation coating, ion implantation coating, sputtering coating, etc., can solve the problem of poor film adhesion, low wear resistance and corrosion resistance, and uneven film thickness and other problems, to achieve the effect of improving wear resistance and corrosion resistance, no three waste discharge, and good combination
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Embodiment 1
[0023] The preferred embodiment of the present invention provides a vacuum arc ion coating method, which is applied to the chrome plating on the surface of the welded components of the inner casing with a complex structure. The structural diagram of the components refers to the attached figure 1 As shown, the A part, B part, C part, D part, E part and F part of the module are coated, and the coating process flow chart refers to the attached figure 2 shown, including the following steps:
[0024] (1) Pretreatment: The welded components of the inner casing are polished with metallographic sandpaper and then cleaned.
[0025] In the welding assembly of the inner casing, after the front sealing balloon, the rear sealing balloon and the inner casing body are welded to form a closed cavity, there are a large number of air film holes on the surface of the front sealing balloon and the rear sealing balloon, and the welding parts have Oxidation color, if the conventional wet sand blo...
Embodiment 2
[0040] This embodiment is roughly the same as Embodiment 1, the difference is that
[0041] In step (2), the inner casing welding assembly is heated to a temperature of 400°C.
[0042] In step (3), ion bombardment is performed by applying a bombardment negative bias to the inner casing welding assembly. The specific steps are: initially apply a bombardment negative bias of 960V to the inner casing welding assembly, and the bombardment time is 3 minutes; reduce the bombardment negative bias To 700V, after starting the arc source of the chromium target, bombard for 3 minutes; continue to reduce the bombarding negative bias voltage to 500V, and bombard for 5 minutes; continue to reduce the bombarding negative bias voltage to 350V, and bombard for 15 minutes.
[0043] In step (4), the negative bias applied to the inner casing welding assembly is reduced to 180V, the working current of the chromium target arc source is adjusted to 90A, and the chrome is plated for 30 minutes; the n...
Embodiment 3
[0048] This embodiment is roughly the same as Embodiment 1, the difference is that
[0049] In step (2), the inner casing welding assembly is heated to a temperature of 200°C.
[0050] In step (3), ion bombardment is carried out by applying a bombardment negative bias to the inner casing welding assembly. The specific steps are: initially apply a bombardment negative bias of 1050V to the inner casing welding assembly, and the bombardment time is 5 minutes; reduce the bombardment negative bias To 900V, after starting the arc source of the chromium target, bombard for 5 minutes; continue to reduce the bombardment negative bias to 700V, and bombard for 10 minutes; continue to reduce the bombardment negative bias to 450V, and bombard for 30 minutes.
[0051] In step (4), the negative bias applied to the inner casing welding assembly is reduced to 250V, the working current of the chromium target arc source is adjusted to 90A, and the chromium plating is performed for 10 minutes; th...
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Abstract
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