A silver-introduced hafnium nitride film high infrared reflective durable material

A hafnium nitride film and infrared reflection technology, which is applied in metal material coating process, sputtering plating, ion implantation plating, etc., can solve the problems of low melting point, easy corrosion, no high durability and high infrared reflection, poor durability to achieve excellent durability and good infrared reflectivity
CN106646703BInactive Publication Date: 2018-09-11JILIN UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
JILIN UNIV
Publication Date
2018-09-11
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention provides a novel silver-introduced hafnium-nitride-membrane high-infrared-reflection durable material and relates to the field of infrared reflection membrane materials. The material is a HfN-Agx membrane formed by HfN and Ag, the HfN-Agx membrane has a solid solution structure comprising HfN and Ag, and the content of Ag is 0.8-3.8at.%. A preparation method of the durable material includes: selecting a silicon wafer or a glass substrate to use as the substrate, placing a Hf target and a Ag target into a magnetic control sputtering chamber, vacuumizing, setting magnetic control sputtering parameters, feeding N2 and Ar gas, and depositing the HfN-Agx membrane onto the substrate. The durable material is good in infrared reflection performance and excellent in durability, can be hopefully used as the high-infrared-reflection durable membrane in harsh environments with high-speed solid-liquid particle impact, high temperature and corrosive liquid and gas, and can also be applied to the surface of an optical reflection device.
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Description

technical field

[0001] The invention relates to the field of infrared reflection film materials, in particular to a silver-introduced hafnium nitride film high infrared reflection durable material. Background technique

[0002] The rapid development of modern technology has led to extremely high requirements for reflective coating materials for exposed infrared optical devices (such as optical mirrors), not only must have high infrared reflectivity, but also have high durability (high hardness, wear resistance, corrosion resistance), the mirror coating currently used does not have the excellent properties of high durability and high infrared reflection to some extent, taking the most commonly used reflective coating aluminum as an example, it has extremely high Infrared reflectivity, but it also has poor environmental durability such as low hardness, low melting point and easy corrosion; take reflective coating silver as an example, which has better infrared reflection perfo...

Claims

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