Leakage hole's leakage rate measuring apparatus
A technology of leak rate measurement and leak hole, which is applied in the field of leak detection, can solve the problems of high development cost, long test cycle, and complex structure of the measurement device, and achieve the effects of wide application range, reduced measurement error, and low measurement cost
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[0029] Such as figure 1 As shown, a leak rate measuring device includes a reference chamber 1, a first valve 2, a second valve 3, a differential pressure gauge 4, a measuring chamber 5, a fourth valve 6, a measuring unit 7, a fifth valve 8, and absolute Vacuum gauge 9, surge chamber 10, needle valve 11, flow meter 12, gas cylinder 13, diaphragm pump 14, turbo molecular pump 15, sixth valve 16, third valve 17, and air extraction unit 18;
[0030] The gas cylinder 13 is connected to the plenum 10 through the flow meter 12 and the needle valve 11. An absolute vacuum gauge 9 is installed on the plenum 10, and the air extraction unit 18 is connected to the plenum 10 through the sixth valve 16. The third valve 17 is connected to the reference chamber 1, the measurement unit 7 is connected to the measurement chamber 5 through the fourth valve 6, and the pressure chamber 10 is connected through the fifth valve 8, and the reference chamber 1 is connected to the reference chamber through th...
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