Plasma nitriding furnace system

Abstract

A plasma nitriding furnace system comprises a computer, a gas control station, a plasma nitriding furnace body, a motor, a waste gas combustion pipe, an air inlet pipe, a pressure closed-loop control system, a temperature closed-loop control system, a vacuum pump module, a rectifier module, a chopping module, a protection module, a control module and a plasma heating pulse power source, and a cathode disc is arranged in the plasma nitriding furnace body. A vacuum pump is led into the plasma nitriding furnace body through an air extraction pipeline, and the air inlet pipe is arranged on the top of a tufftriding furnace. The air extraction pipeline is provided with a vacuum butterfly valve. The plasma heating pulse power source is adopted in the furnace, efficiency is improved, furnace temperature uniformity is improved, and accordingly the stability of the nitrogen content of the product is improved. The overall structural design is ingenious, and detaching and maintaining are convenient; and according to the whole technical scheme, the occupied area is small, the cost is low, and large-scale usage and popularization are convenient.

Description

[0001] 【Technical field】 [0002] The invention relates to a nitriding furnace device, in particular to a plasma nitriding furnace system. [0003] 【Background technique】 [0004] During the production process of the existing metal parts in the ion nitriding furnace, according to the requirements of the nitriding process, the nitriding medium, such as nitrogen, hydrogen, ammonia, carbon-containing atmosphere, sulfur-containing atmosphere, etc., needs to be passed into the vacuum container. And apply a DC high-voltage pulse (600 volts-1000 volts) between the cathode and anode in the vacuum container to ionize the gas to form a glow discharge, the temperature of the parts involved in the ion nitriding process (510-560 degrees), and the pressure of the vacuum container (10Pa-400Pa), the mass flow control of various gases (NH3, N2, H2, CO2), and the nitriding time (8-30 hours) of process production and other physical parameters required by the process, and the electrical parameters...

AI Technical Summary

Problems solved by technology

[0005] 1) In the prior art, in order to prevent the oxidation of the iron nitride alloy, the high-temperature finished product after the nitriding reaction must be sealed and cooled before it can be released from the furnace. However, the current cooling technology mainly adopts the method of cooling with the furnace or forced cooling on the outer wall of the reaction tank. The methods all waste the heat energy of the product and reduce the cooling efficiency; 2) continuous production cannot be realized basically in the prior art, thus the production cycle is long and the efficiency is low; 3) the heating of the metal material in the prior art is all single-sided heating, and the upper Radiation or the outer circumference of the cylinder is heated, so the thickness of the material is too thick, which will lead to uneven heating temperature, resulting in unstable nitrogen content of the product