Manufacture method of Schottky photovoltaic cell based on graphene and silicon reverse pyramid array

Abstract

The invention relates to a manufacture method of a Schottky photovoltaic cell based on graphene and a silicon reverse pyramid array. Silicon oxide (SiO2) is grown on a monocrystalline n-Si semiconductor substrate by thermooxidizing and serves as an isolation layer, hydrofluoric acid (HF) is used to corrode the SiO2 isolation layer to form a window, the SiO2 isolation layer in the periphery of the window and the back side of a semiconductor are coated with an insulating tape and thus protected, the silicon reverse pyramid array is prepared in the window by using a metal-assisted chemical etching method, the insulating tape is torn, cleaning is carried out, the back side of the substrate is smeared with In/Ga alloy to serve as a back electrode, metal Au is evaporated and deposited on the isolation layer to serve as a front electrode, and graphene is transferred onto the silicon reverse pyramid array and is electrically connected with the front electrode. The photovoltaic cell is simple in structure, easy to prepare and low in cost, reflection of incident light is reduced effectively, the Schottky junction contact area is increased, and the conversion efficiency of the photovoltaic cell is improved.

Description

technical field [0001] The invention belongs to the technical field of solar cells, and relates to a method for preparing a graphene-silicon inverted pyramid array Schottky junction photovoltaic cell. Background technique [0002] With the increasing global environmental pollution and the increasingly tense energy situation, energy issues have gradually attracted the attention of countries all over the world. At present, energy is mainly composed of traditional fossil fuels such as oil and coal, but these energy sources are non-renewable energy sources, and their dwindling storage capacity is difficult to meet the growing demand of human beings. For sustainable development, renewable energy sources are becoming more and more popular. human concern. Among them, the energy of solar energy is huge, inexhaustible, widely distributed, suitable for use in most parts of the world, the materials used are safe and reliable, and there is no environmental pollution, so it has great pr...

AI Technical Summary

Problems solved by technology

Although the photoelectric conversion efficiency is low, its simple structure, easy preparation, low cost, and environmental protection make it have great potential for development in photovoltaic cells.

In the literature, the graphene-silicon Schottky junction adopts a planar structure, and the planar structure often cannot effectively use the incident light energy. For example, the reflectivity of planar silicon in the visible light range is as high as 30%, resulting in a large loss of light energy.

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