High-hardness wear-resistant thermal-shock-resistant thick tantalum coating and preparation method thereof

A technology of thermal shock resistance and tantalum coating, which is applied in the field of wear-resistant coatings, can solve the problems of high price, affecting the service performance of coatings, and high cost, so as to improve wear resistance and thermal shock resistance and reduce thermal physical properties Mismatch degree, effect of improving wear resistance and thermal shock resistance

Active Publication Date: 2017-09-05
NORTHEASTERN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the two noble gases Xe and Kr are very rare and expensive
This method is very difficult to obtain high-purity and high-thickness α-Ta coatings, and the cost is huge, making it difficult to achieve widespread production
At the same time, there are large differences in hardness, elastic modulus, thermal diffusivity, and lattice constant between the base alloy (mostly stainless steel) such as gun barrels and hydraulic rods, and the α-Ta coating, which greatly affects the coating and substrate. The bonding strength between them will affect the service performance of the coating
Therefore, in China, the work related to the sputtering tantalum process is still in the laboratory stage, and the prepared coating thickness, phase structure and performance are far from meeting expectations.

Method used

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  • High-hardness wear-resistant thermal-shock-resistant thick tantalum coating and preparation method thereof
  • High-hardness wear-resistant thermal-shock-resistant thick tantalum coating and preparation method thereof
  • High-hardness wear-resistant thermal-shock-resistant thick tantalum coating and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] The substrate is made of 304 stainless steel, the sample size is 15mm×10mm×2mm, and the purity of the tantalum target is 99.99wt%. -2 Pa~7×10 -2 Pa, turn on the heater, heat the vacuum chamber to 200°C, and then pump the background vacuum to below 6×10 -3 Pa (the degree of vacuum in this embodiment is 1×10 -3 Pa). Argon gas was flowed at a rate of 8 sccm and nitrogen gas was supplied at a rate of 5 sccm to a pressure of 0.19 Pa, and sputtering of the target was started. The sputtering target power was set at 2.0 kW, the deposition time was about 4 hours, and the thickness of the tantalum coating was about 50 μm.

[0040] In this embodiment, the cross-section and surface observation of the deposited tantalum coating can be seen to have a dense film structure and a good combination with the substrate, such as figure 1 a and figure 1 As shown in b. X-ray diffraction analysis shows that the existence of almost no β-Ta diffraction peaks can be detected in the coating, ...

Embodiment 2

[0042] The substrate is made of 30CrNi3MoV alloy steel. The sample size is 15mm×10mm×2mm. The purity of the tantalum target is 99.99wt%. -2 Pa~7×10 -2Pa, turn on the heater, heat the vacuum chamber to 200°C, and then pump the background vacuum to below 6×10 -3 Pa (the degree of vacuum in this embodiment is 2×10 -3 Pa). Argon gas was flowed at a rate of 8 sccm and nitrogen gas was supplied at a rate of 3 sccm to a pressure of 0.19 Pa, and sputtering of the target was started. The sputtering target power was set at 2.0 kW, the deposition time was about 1 hour, and the thickness of the tantalum coating was about 15 μm.

[0043] In this embodiment, the cross-section and surface observation of the deposited tantalum coating shows that the structure of the coating is dense and well combined with the substrate. X-ray diffraction analysis shows that almost no β-Ta diffraction peak can be detected in the coating, which is the diffraction peak of pure phase α-Ta.

Embodiment 3

[0045] The substrate is made of PCrNi3MOV alloy steel. The sample size is 15mm×10mm×2mm. The purity of the tantalum target is 99.99wt%. -2 Pa~7×10 -2 Pa, turn on the heater, heat the vacuum chamber to 200°C, and then pump the background vacuum to below 6×10 -3 Pa (the degree of vacuum in this embodiment is 3×10 -3 Pa). Argon gas was flowed at a rate of 8 sccm and nitrogen gas was supplied at a rate of 4 sccm to a pressure of 0.19 Pa, and sputtering of the target was started. The sputtering target power was set at 2.0 kW, the deposition time was about 5 hours, and the thickness of the tantalum coating was about 60 μm.

[0046] In this embodiment, the cross-section and surface observation of the deposited tantalum coating shows that the structure of the coating is dense and well combined with the substrate. X-ray diffraction analysis shows that almost no β-Ta diffraction peaks can be detected in the coating, which are all diffraction peaks of pure phase α-Ta. For the deposi...

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Abstract

The invention relates to the field of wear-resistant coatings, in particular to a high-hardness wear-resistant thermal-shock-resistant thick tantalum coating and a preparation method thereof. The tantalum coating comprises 100% of alpha-phase tantalum and has relatively high toughness. Meanwhile, trace nitrogen atoms are fixedly dissolved in the alpha-phase tantalum of a body-centered cubic lattice, and the hardness and elasticity modulus of the tantalum coating are improved, so that the wear resistance and thermal shock resistance of the coating are improved. The final thickness of the tantalum coating can reach 60 microns or above. The preparation method of the high-hardness wear-resistant thermal-shock-resistant thick tantalum coating is magnetron sputtering under the environment of argon and nitrogen. Pure tantalum serves as a target material, under a certain vacuum degree, argon (Ar) and nitrogen (N2) are used as sputtering gas, and a layer of nanocrystalline thick tantalum coating is directly deposited on the surface of a base material. The coating has excellent comprehensive properties such as high hardness, high toughness, wear resistance and thermal shock resistance.

Description

[0001] Technical field: [0002] The invention relates to the field of wear-resistant coatings, and in particular provides a thick tantalum coating with high hardness, wear resistance and thermal shock resistance and a preparation method thereof. [0003] Background technique: [0004] In active military and civilian key components such as the inner wall of the artillery barrel, the hydraulic piston rod, the holes in the diesel and aircraft engine cylinders, and the hydraulic shaft, in order to improve the service life, increase the wear resistance and corrosion resistance, the surface is usually electroplated with chrome coating. Electroplated chromium coating has many advantages such as high hardness, excellent wear resistance and corrosion resistance, but there are also many disadvantages, such as: high brittleness, low shear strength and tensile strength, and the existence of microcrack defects, which are ablation The intrusion of atmosphere or corrosive solution provides ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/16C23C14/35
CPCC23C14/165C23C14/35
Inventor 陈明辉王群昌王福会
Owner NORTHEASTERN UNIV
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