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Method for preparing nanoparticles by using laser

A nanoparticle and laser technology, applied in nanostructure manufacturing, nanotechnology, nanotechnology, etc., can solve problems such as low production yield, high cost, and complex system

Inactive Publication Date: 2017-09-26
SHONANO +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] The present invention is used to improve the problem of low production yield in the existing nanoparticle preparation method utilizing laser, and its purpose is to provide 6 ) Nanoparticles prepared by irradiating a mixed gas formed by mixing a catalytic gas with a laser beam, thereby increasing the production yield of nanoparticles by using a catalytic gas
[0008] In particular, another object of the present invention is to improve the production of unreacted toxic raw material gases resulting in damage to the environment due to the low production yield of nanoparticles in the existing nanoparticle preparation process, and to recycle waste raw materials When the gas is reused, the system is complicated and requires high cost. By irradiating the mixed gas of the raw material gas and the catalytic gas with a laser absorbing a high-energy wavelength, the reaction rate of the raw material gas is improved, and the energy-saving effect is obtained. Particle Preparation Method

Method used

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preparation example Construction

[0043] 1. Preparation device of nanoparticles

[0044] In this example, the preparation device used for the preparation of nanoparticles is as follows figure 1 Shown is irradiated at a maximum power of 60W in CO 2 The laser irradiation part 10 for the laser light generated by the laser generator, the reaction chamber 20, the collection part 30, the vacuum pump 40, and the raw material gas supply nozzle 50a for supplying the raw material gas into the reaction chamber 20 and the nozzle for supplying the carrier gas are included. The injection part 50 of the carrier gas supply nozzle 50b constitutes a general nanoparticle preparation device.

[0045] 2. Preparation of Nanoparticles

[0046] Hereinafter, standard cubic centimeters per minute (Standard Cubic Centimeters Per Minute, sccm), which is a unit used in the present invention, represents a flow rate unit.

Embodiment 1

[0048] 25 sccm (100 parts by volume) of monosilane (SiH 4 ), 100 sccm (400 parts by volume) of hydrogen (H 2 ) and 5 sccm (20 parts by volume) of sulfur hexafluoride (SF 6 ) A mixed gas formed by mixing catalytic gases. At this time, the mixed gas supplied to the inside of the reaction chamber 20 is irradiated by the laser irradiation unit 10 in the form of a continuous wave line beam (Line Beam) with a wavelength of 10.6 μm from CO 2 The laser generator generates laser light for 1 hour, thus, if figure 2 and image 3 As shown, silicon nanoparticles 60 are generated and then recovered through collection section 30 using vacuum pump 40 . In Example 1, the production yield of silicon nanoparticles (Si-NPs) with a particle size of 10-30 nm was 52.4%.

Embodiment 2

[0050] 25 sccm (100 parts by volume) of monosilane (SiH 4 ), 100 sccm (400 parts by volume) of hydrogen (H 2) and 10sccm (40 parts by volume) of sulfur hexafluoride (SF 6 ) A mixed gas formed by mixing catalytic gases. At this time, the mixed gas supplied to the inside of the reaction chamber 20 is irradiated by the laser irradiation unit 10 in the form of a continuous wave line beam (Line Beam) with a wavelength of 10.6 μm from CO 2 Laser generator generates laser light for 3 hours, thus, if figure 2 and image 3 As shown, silicon nanoparticles 60 are generated and then recovered through collection section 30 using vacuum pump 40 . In Example 2, the production yield of silicon nanoparticles (Si-NPs) with a particle size of 10-30 nm was 97.1%.

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Abstract

The present invention relates to a method for preparing nanoparticles by using a laser, the method preparing nanoparticles by emitting a laser beam at a gas mixture comprising a material gas and a sulfur hexafluoride (SF6) catalyst gas, thereby having effects of improving production yield and saving energy according to the improvement in production yield. In order to solve the problem of a low production yield in a conventional method for preparing nanoparticles by using a laser, the present invention prepares nanoparticles by emitting a laser beam at a gas mixture comprising a material gas and a sulfur hexafluoride (SF6) catalyst gas, thereby improving the production yield of nanoparticles by means of the catalyst gas. Particularly, in order to remedy the problems of environmental damage occurring due to the generation of a material gas, which is an unreacted toxic gas, since the production yield of nanoparticles is low in a conventional preparation of nanoparticles, and of a system becoming complex and of high costs when recovering and reusing the material gas to be discarded, the present invention increases the reaction yield of a material gas by emitting the laser having a wavelength with excellent energy absorption at a gas mixture of the material gas and a catalyst gas, thereby having an effect of saving energy.

Description

technical field [0001] The present invention relates to a method for preparing nanoparticles using laser light, and in more detail, relates to the combination of raw material gas and sulfur hexafluoride (SF 6 ) The mixed gas formed by mixing the catalytic gas phase is irradiated with a laser beam to prepare nanoparticles, thereby improving the production yield of nanoparticles and obtaining an energy-saving nanoparticle preparation method using laser. Background technique [0002] Nanotechnology is the core technology of science and technology in the 21st century. It not only triggers technological innovation through the combination with traditional manufacturing industries, but also is the basic technology to further enhance the future core strategic business through the integration of IT, BT, CT and other advanced technologies. It is considered as the next A generational growth engine. The preparation methods of nanomaterials applied to the above-mentioned advanced techno...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J19/08B22F1/00B22F9/30C01B33/027B82B3/00
CPCB01J19/08B22F9/30B82B3/0004C01B33/027C01P2004/64B01J2219/0883B22F1/054B01J19/121B01J2219/0892B01J37/349B01J21/08B01J37/0072B22F9/28B22F2999/00C01B33/021B01J35/393B01J35/45B01J35/70B01J2235/00B01J35/80B01J2235/30B22F3/105B22F3/1039B01J35/23B01J35/30B01J27/12C01G17/00
Inventor 曹元一金成范
Owner SHONANO