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A method for manufacturing a quartz glass cylindrical polishing disc based on a gel substrate

A quartz glass, gel-based technology, used in grinding/polishing equipment, wheels with flexible working parts, manufacturing tools, etc., can solve problems such as toxicity, increased polishing costs, environmental pollution, etc., and achieve improved strength. and elasticity, saving polishing abrasives, and reducing environmental pollution

Active Publication Date: 2019-05-14
TONGJI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Traditional chemical mechanical polishing uses polishing pads to transmit and evenly distribute polishing liquid, and uses the chemical reaction between the composition of the polishing liquid and the surface of the material to be polished to produce substances that are relatively easy to remove, and the physical friction between the polishing particles and the surface to be polished, to achieve polishing. purpose, but because the polishing pad is flat, it can only be polished flat, and the price of the polishing pad is higher, which increases the polishing cost; on the other hand, the polishing process will also cause a waste of polishing fluid. Cerium oxide polishing fluid is expensive and toxic, causing pollution to the environment
Chinese patent 201110231332.7 discloses a glass polishing disc and its manufacturing method. The raw material of the polishing disc includes abrasive grains, fillers, resins, curing agents, and accelerators. The abrasive grains are aluminum oxide-cerium oxide core-shell composite abrasive grains. Or cerized abrasive grains on the surface of alumina, the fillers include thermally conductive fillers, active fillers, and pore-forming agents, and the resin is unsaturated polyester resin, but the polishing disc has many components and the preparation process is complicated

Method used

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  • A method for manufacturing a quartz glass cylindrical polishing disc based on a gel substrate
  • A method for manufacturing a quartz glass cylindrical polishing disc based on a gel substrate
  • A method for manufacturing a quartz glass cylindrical polishing disc based on a gel substrate

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] A method for manufacturing a quartz glass cylindrical polishing disc based on a gel substrate, the specific steps are:

[0024] (1) Determine the mold size of the bearing gel base, according to the formula L=(r 1 -r 2 )*4.5, where L is the thickness of the gel base, r 1 is the radius of the mold carrying the gel base, r 2 is the actual radius of the quartz glass cylindrical surface to be polished, and the mold is a stainless steel mold, such as figure 1 The front of the mold 3 is provided with an arc-shaped groove bearing surface 2 for carrying the gel base, and the back is provided with bolt holes 1 for installation and connection.

[0025] (2) Preparation of gel samples: polyvinyl alcohol particles were placed in distilled water, heated and stirred in a water bath at 95°C for 6 hours to dissolve, and the water reduced by evaporation was continuously replenished, and finally a clear polyvinyl alcohol aqueous solution was prepared, and cooled to room temperature for ...

Embodiment 2

[0029] A method for manufacturing a quartz glass cylindrical polishing disc based on a gel substrate, the specific steps are:

[0030] (1) Determine the mold size of the bearing gel base, according to the formula L=(r 1 -r 2 )*4.5, where L is the thickness of the gel base, r 1 is the radius of the mold carrying the gel base, r 2 is the actual radius of the quartz glass cylindrical surface to be polished, and the mold is a stainless steel mold, such as figure 1 The front of the mold 3 is provided with an arc-shaped groove bearing surface 2 for carrying the gel base, and the back is provided with bolt holes 1 for installation and connection.

[0031] (2) Preparation of gel samples: polyvinyl alcohol particles were placed in distilled water, heated and stirred in a water bath at 95°C for 6 hours to dissolve, and the water reduced by evaporation was continuously replenished, and finally a clear polyvinyl alcohol aqueous solution was prepared, and cooled to room temperature for ...

Embodiment 3

[0035] A method for manufacturing a quartz glass cylindrical polishing disc based on a gel substrate, the specific steps are:

[0036] (1) Determine the mold size of the bearing gel base, according to the formula L=(r 1 -r 2 )*4.5, where L is the thickness of the gel base, r 1 is the radius of the mold carrying the gel base, r 2 is the actual radius of the quartz glass cylinder to be polished, and the mold is a stainless steel mold, such as figure 1 The front of the mold 3 is provided with an arc-shaped groove bearing surface 2 for carrying the gel base, and the back is provided with bolt holes 1 for installation and connection.

[0037](2) Preparation of gel samples: polyvinyl alcohol particles were placed in distilled water, heated and stirred in a water bath at 95°C for 6 hours to dissolve, and the water reduced by evaporation was continuously replenished, and finally a clear polyvinyl alcohol aqueous solution was prepared, and cooled to room temperature for later use. ...

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Abstract

The invention relates to a manufacturing method for a quartz glass cylindrical surface polishing disc based on a gel substrate. The method comprises the following specific steps that according to the radius of a quartz glass cylindrical surface needing to be polished, the thickness of the gel substrate is determined, and the size of a mold is determined; (2) a mixed aqueous solution of polyving akohol, sodium alga acid, silicon dioxide and cerium oxide is prepared and poured into the mold, freezing is repeated, unfreezing is circulated for many times, gel is formed, then the generated gel is placed in a cerium oxide polishing solution for steeping, and finally washing is conducted with distilled water; and (3) the gel is laid on the mold, constant-temperature drying is conducted till the weight is constant, and then the quartz glass cylindrical surface polishing disc is obtained. According to the polishing disc based on the polyving akohol and sodium alga acid gel substrate, compared with the prior art, the space net-shaped structure of the gel is utilized to wrap nanoscale cerium oxide particles, a cylindrical surface mold is formed after drying and used for polishing the quartz glass cylindrical surface, the polishing requirements are met, the polishing grinding material is saved, environment pollution is reduced, and cost is reduced.

Description

technical field [0001] The invention relates to the technical field of chemical mechanical polishing of hard and brittle materials, in particular to a method for manufacturing a quartz glass cylindrical surface polishing disc based on a gel substrate. Background technique [0002] Traditional chemical mechanical polishing uses polishing pads to transmit and evenly distribute polishing liquid, and uses the chemical reaction between the composition of the polishing liquid and the surface of the material to be polished to produce substances that are relatively easy to remove, and the physical friction between the polishing particles and the surface to be polished, to achieve polishing. purpose, but because the polishing pad is flat, it can only be polished flat, and the price of the polishing pad is higher, which increases the polishing cost; on the other hand, the polishing process will also cause a waste of polishing fluid. Cerium oxide polishing fluid is expensive and toxic,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24D13/14B24D18/00B24D3/00
CPCB24D3/002B24D3/005B24D13/142B24D18/009
Inventor 王昆曲庆韬王占山吴意
Owner TONGJI UNIV
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