A micro-elastic nano pressure sensor and health monitoring system
A pressure sensor and nanotechnology, applied in the field of medical sensing and intelligent medical treatment, can solve the problems of weak signal output and insufficient sensitivity, and achieve the effect of large signal output, low cost and strong portability
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Embodiment 1
[0032] In Embodiment 1, the material of the flexible polymer insulating film 211 is polyethylene terephthalate, polytetrafluoroethylene, polystyrene, polyimide, polyethylene, polydimethylsiloxane , fluorinated ethylene propylene copolymer, polychlorotrifluoroethylene, polyvinylidene fluoride, ethylene tetrafluoroethylene copolymer, polymethyl methacrylate or polyethylene-polyvinyl acetate copolymer, or for coating with resident Pole material silicon nitride, silicon dioxide, perfluorocyclic polymer CYTOP or polymer of parylene.
[0033] The flexible polymer film 221 with multiple microelastic structures is made of polyethylene-polyvinyl acetate copolymer, fluorinated ethylene-propylene copolymer, polyethylene terephthalate, polytetrafluoroethylene, Polystyrene, polyimide, polyethylene, polydimethylsiloxane, polychlorotrifluoroethylene, polyvinylidene fluoride, ethylene tetrafluoroethylene copolymer or polymethylmethacrylate.
[0034] The material of the first metal conductive l...
Embodiment 2
[0035] The structure of the microelastic body nano pressure sensor that embodiment 2 provides is as figure 2 As shown, among them, figure 2 (a) is the three-dimensional cross-sectional schematic diagram of the microelastic body nano pressure sensor that embodiment 2 provides; figure 2 (b) is a schematic cross-sectional view of the microelastic nano pressure sensor provided in embodiment 2; through the micro elastic nano pressure sensor provided in embodiment 2, the micro elastic nano pressure sensor provided in embodiment 1 is folded and formed in series , can improve sensitivity, save space, and facilitate packaging.
[0036] In the foregoing embodiments, before being assembled into a microelastic nano pressure sensor, the flexible polymer insulating film is polarized to improve the output response of the micro elastic nano pressure sensor to pressure; the flexible polymer film The microelastic structure can be hemispherical, triangular, pyramidal or cuboidal.
[0037] ...
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