Method for preparing zinc oxide nanopillar array

A zinc oxide nano- and nano-column array technology, which is applied in the field of nano-materials, can solve the problems of poor array order and uneven size of zinc oxide nano-column arrays, and achieve the effects of improving order, easy promotion, and convenient operation
CN107344730AInactive Publication Date: 2017-11-14NANJING UNIV OF INFORMATION SCI & TECH
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
NANJING UNIV OF INFORMATION SCI & TECH
Publication Date
2017-11-14
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

The invention provides a method for preparing a zinc oxide nanopillar array. According to the method, the current micro-electronic processing technology with technical maturity is utilized. The method comprises the following steps: by taking an aqueous solution of Zn(NO3)2 and hexamethylphosphoramide as a precursor solution for growth of a ZnO nanopillar array on a GaN template with nano-array patterns, preparing the ZnO nanopillar array with ordered height and uniform size through gravity-assisted inverted growth by adopting a hydrothermal method. The nano-array templates of different patterns are manufactured to grow different ZnO nanopillar arrays; and the nanopillar size is regulated by adjusting the concentration of the Zn(NO3)2 and hexamethylphosphoramide and the growth temperature of the nanopillar array. According to the method disclosed by the invention, various ZnO nanopillar arrays with ordered heights and uniform sizes can be prepared by adjusting different process parameters.
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Description

technical field

[0001] The invention belongs to the technical field of nanometer materials, and in particular relates to a preparation method of a zinc oxide nanocolumn array. Background technique

[0002] ZnO is a wide-bandgap semiconductor material with direct bandgap, which has very attractive application prospects in the fields of short-wavelength light-emitting diodes, laser diodes, and capacity storage. ZnO nanoarrays have unique optoelectronic properties and have flat end faces that can be used as micro-Faper cavities, which provide convenient conditions for the construction of ZnO nanolasers. The application in the field of microelectronics and optoelectronics can improve the working characteristics of the device, such as making ZnO nano-array structure on the surface of the LED, using the surface scattering and light waveguide mechanism to improve the light extraction efficiency of the LED; assembling the ZnO nano-array on the surface of the solar cell as an anti-re...

Claims

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