Multi-station integrated repair method for micro-defects on the surface of large-aperture fused silica optical elements

Abstract

The invention discloses a large-caliber fused quartz optical element surface micro defect multi-station integrated repairing method. A UV laser pretreatment system, a microscopic detection system, and a carbon dioxide laser repairing system are all arranged on a multiple freedom degree fused quartz optical element positioning platform, and three-station integration is realized. After a fused quartz optical element is installed and positioned, UV laser spots are used to carry out a full-caliber line-by-line reciprocating scanning pretreatment on the surface of the optical element; then the microscopic detection system is used to carry out full-caliber dark field scanning detection on the defects on the surface of the fused quartz optical element; finally, micro defect interest points that need to be repaired are picked out, through the CO2 infrared laser system, the micro defects on the surface of the fused quartz optical element are subjected to local single point melting repairing, the multi-station integrated repairing of micro defects on the surface of the fused quartz optical element is completed; multi-station integration is realized, the clamping time of each station is reduced by at least 150 minutes, and the efficiency of micro defect repairing is improved.

Description

technical field [0001] The invention belongs to the field of engineering optics, and in particular relates to a multi-station integrated repair method for micro-defects on the surface of a large-diameter fused silica optical element. Background technique [0002] Large-aperture fused silica optical components are the most commonly used optical components in the terminal optical components of high-power solid-state laser devices. Surface micro-defects, especially in high-power solid-state laser systems, when large-aperture fused silica optical elements are irradiated by triple-frequency ultraviolet strong lasers, micro-cracks, micro-pits and other ablation point micro-defects are more likely to occur. Studies have shown that when micro-defects such as micro-cracks or ablation points are generated, the size of micro-defects on the back surface of optical components increases exponentially with the increase in the number of laser irradiation. When the total area of ​​micro-def...

AI Technical Summary

Problems solved by technology

[0003] In the detection and repair technology of micro-defects on the surface of large-diameter fused silica optical components, foreign countries use a single station to realize the detection of micro-defects on the surface of fused silica optical components, ultraviolet laser pretreatment, and carbon dioxide infrared laser repair. Their mutual micro-defect repair and image processing information cannot be effectively shared

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