A Method for Cutting Squared Monocrystalline Silicon Rods Using Diamond Wire

Abstract

The invention provides a method of cutting and squaring a single crystal silicon round rod by utilizing a diamond line. The method utilizes high-speed feeding of the diamond line to cut the single crystal silicon round rod and comprises the following concrete steps of (1) wire winding: winding a diamond wire to form a wire net of a well-shaped structure after the diamond passes through a cutting wheel and guide wheels; (2) crystal rod mounting: mounting a crystal rod on a workbench, enabling the diamond cutting wire to form a field angle between the crystal rod and each of the guide wheels at the front, the back, the left and the right of the crystal rod; (3) parameter setting: setting a line tension, a feeding speed and a new wire feeding quantity according to the diameter of the crystal rod; (4) cutting: carrying out continuous cutting through relative movement of the diamond cutting wire and the single crystal round rod to be cut; and (5) finishing cutting, and ending a program. The method has the advantages that the feeding speed is increased, the new wire feeding quantity and the steel wire consumption quantity are reduced, and the quality of a quasi-square rod subjected to squaring is in a controlled state.

Description

technical field

[0001] The invention relates to the technical field of single crystal silicon processing, in particular to a method for cutting a square rod of single crystal silicon by using a diamond wire. Background technique

[0002] The existing wire squaring technology originated from the multi-wire cutting technology, which is a physical processing method that does not affect the characteristics of the workpiece. Through the high-speed reciprocating motion of the staggered wire mesh, the abrasive grains are brought into the workpiece processing area for grinding, and finally the monocrystalline silicon round rod is cut into a quasi-square rod. During the whole cutting process, it mainly involves high-speed moving metal wire, cutting sand (green silicon carbide), cutting fluid and cutting workpiece. The cutting process is a complex process in which the metal wire, the cutting sand in the cutting fluid and the workpiece contact each other. The cutting sand plays the r...

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