Method for producing soldered electrode and use thereof
A manufacturing method and electrode technology, applied in semiconductor/solid-state device manufacturing, circuits, electrical components, etc., can solve problems such as difficulty in controlling the height of solder bumps and inability to freely select solder composition, so as to improve solder filling ability and prevent cracking Effect
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[0074] Hereinafter, the present invention will be further specifically described based on examples, but the present invention is not limited to these examples. In the description of the following Examples and the like, "part" is used in the meaning of "part by mass".
[0075] 1. Measuring method of physical properties
[0076] (Measuring method of weight average molecular weight (Mw) of alkali-soluble resin (A))
[0077] The weight average molecular weight (Mw) was measured by gel permeation chromatography under the following conditions.
[0078] Pipe string: TSK-M and TSK2500 of the pipe string manufactured by Tosoh Corporation are connected in series
[0079] Solvent: Tetrahydrofuran
[0080] ·Temperature: 40°C
[0081] Detection method: Refractive index method
[0082] ·Standard material: polystyrene
[0083] ・GPC device: manufactured by Tosoh, device name "HLC-8220-GPC"
[0084] 2. Preparation of resist-forming composition
Synthetic example 1
[0085] [Synthesis Example 1] Synthesis of Alkali-Soluble Resin 1
[0086] In a flask with a dry ice / methanol reflux device replaced with nitrogen, 5.0 g of 2,2′-azobisisobutyronitrile as a polymerization initiator, and 90 g of diethylene glycol ethyl as a polymerization solvent were added Methyl ether, stirred. Add 10 g of methacrylic acid, 15 g of p-isopropenylphenol, 25 g of methacrylic tricyclo [5.2.1.0 2 ，6 ]decyl ester, 20g of isobornyl acrylate, and 30g of n-butyl acrylate, start stirring, and heat up to 80°C. Then, it heated at 80 degreeC for 6 hours.
[0087] After heating, the reaction product was added dropwise to a large amount of cyclohexane to solidify. The solidified matter was washed with water, and the solidified matter was redissolved in tetrahydrofuran having the same mass as the solidified matter, and the obtained solution was added dropwise to a large amount of cyclohexane to solidify again. After the redissolving and coagulation operations were performe...
Synthetic example 2
[0088] [Synthesis Example 2] Synthesis of Alkali-Soluble Resin 2
[0089] In a flask with a dry ice / methanol reflux device replaced with nitrogen, 5.0 g of 2,2′-azobisisobutyronitrile as a polymerization initiator, and 90 g of diethylene glycol ethyl as a polymerization solvent were added Methyl ether, stirred. Add 10 g of methacrylic acid, 15 g of p-isopropenylphenol, 25 g of methacrylic tricyclo [5.2.1.0 2.6 ]decyl ester, 20g of tricyclo[5.2.1.0 2.6 ] decyl ester, and 30g of n-butyl acrylate, start stirring, and heat up to 80°C. Then, it heated at 80 degreeC for 6 hours.
[0090] After heating, the reaction product was added dropwise to a large amount of cyclohexane to solidify. The solidified matter was washed with water, and the solidified matter was redissolved in tetrahydrofuran having the same mass as the solidified matter, and the obtained solution was added dropwise to a large amount of cyclohexane to solidify again. After the redissolving and coagulation operati...
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