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Preparation method of hexafluoroethane

A technology of hexafluoroethane and tetrafluoroethylene, applied in the field of preparation of hexafluoroethane, can solve problems such as affecting the service life of equipment, and achieve the effects of reducing production cost, easy control, and avoiding carbon bond breakage

Inactive Publication Date: 2018-01-05
SHANGHAI HELI IND GAS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Method 5 uses pentafluoroethane as raw material to prepare by indirect method, but the by-product is a large amount of acid gas hydrogen fluoride (equal to the molar amount of the product), which seriously affects the life of the equipment

Method used

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  • Preparation method of hexafluoroethane

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Experimental program
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Effect test

Embodiment 1

[0037] Put cobalt difluoride into the reactor (dimensions ￠57×3.5×560), then heat the reactor, use nitrogen to purge the reaction device during the temperature rise, after the internal temperature of the reactor rises to 250°C and the temperature is stable, put The fluorine gas is fed into the reactor to prepare the fluorinating agent. The outlet of the reactor is connected to the aftertreatment system to prevent the fluorine gas from leaking to the outside world. After the reaction, the reactor is replaced and vacuumized, and the reactor is heated to 300° C.; when the temperature is reached, tetrafluoroethylene is added for reaction. After the reaction and replacement, enter the next cycle and start the preparation of the fluorinating agent. In industrial continuous production, two or more reactors can be used for alternate production. The final product obtained is washed with 13% potassium hydroxide alkali, washed with water, adsorbed by molecular sieves, and then purified...

Embodiment 2

[0039] In this embodiment, the reaction temperature between the fluorinating agent and tetrafluoroethylene is set at 270° C., and the implementation steps and parameters are the same as those in Embodiment 1.

Embodiment 3

[0041] In this embodiment, the reaction temperature between the fluorinating agent and tetrafluoroethylene is set at 330° C., and the implementation steps and parameters are the same as those in Embodiment 1.

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Abstract

The invention discloses a preparation method of hexafluoroethane. The preparation method comprises following steps: 1, a fluorating agent is prepared, wherein raw material cobaltous fluoride is delivered into a reactor for drying dehydration, fluorine gas is delivered into the reactor for reaction with cobaltous fluoride under appropriate reaction conditions so as to obtain a needed fluorating agent cobaltic fluoride; 2, the fluorating agent is reacted with tetrafluoroethene to prepare hexafluoroethane, wherein after preparation of the fluorating agent, the reactor is adjusted to appropriate reaction conditions, tetrafluoroethene is delivered into the reactor for reaction with the fluorating agent so as to obtain hexafluoroethane; tetrafluoroethylene is subjected to dehydration treatment before introduction of tetrafluoroethylene into the reactor, and the obtained product is subjected to purifying via alkali washing, water washing, adsorption, and rectification so as to obtain the highpurity product. The reaction conditions are mild; breaking of carbon bonds is avoided effectively, generation of a large amount of by-products is avoided; the difficulty of subsequent purifying is reduced; equipment corrosion caused by acidic gas by-product is avoided; the preparation method is simple and safe, is convenient to control, and is low in production cost.

Description

technical field [0001] The invention relates to the technical field of fluorine chemical industry, in particular to a method for preparing hexafluoroethane with high raw material conversion rate, high yield, low cost and simple process. Background technique [0002] Hexafluoroethane, also known as perfluoroethane, chemical formula C 2 f 6 , because of its stable chemical properties, non-toxic and odorless, it is widely used in etching gas and cleaning gas in semiconductor and microelectronics industries. In the above-mentioned industries, the process conditions are very strictly controlled, so the purity of the required hexafluoroethane is also very strict, often requiring a purity of more than 5N. [0003] For the preparation method of hexafluoroethane, following several reports are arranged at present: [0004] 1. Prepared by reacting activated carbon directly with fluorine gas (CN201210589146.5); [0005] 2. Prepared by reaction of hydrogen fluoride and hydrochloroflu...

Claims

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Application Information

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IPC IPC(8): C07C17/00C07C19/08
Inventor 梁成科
Owner SHANGHAI HELI IND GAS CO LTD
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