A flexible hard composite coating, a preparing method thereof and a coating cutter
A composite coating and hard technology, applied in the direction of coating, manufacturing tools, cutting tools for lathes, etc., can solve the problems of easy cracking, unsuitable for high-speed processing, small plastic deformation, etc., to increase the crystal structure and crystal structure. Boundary, improve high temperature oxidation resistance, improve the effect of toughness
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[0028] The present invention also provides a method for preparing the flexible hard composite coating described in the above technical solution, comprising the following steps:
[0029] (1) Depositing an AlCrN transition layer on the surface of the substrate;
[0030] (2) On the surface of the AlCrN transition layer in the step (1), alternately deposit CrON layers and AlON layers in sequence to obtain a flexible hard composite coating.
[0031] The invention deposits an AlCrN transition layer on the surface of the substrate. In the present invention, the material of the substrate is preferably cemented carbide or high-speed steel, more preferably cemented carbide. In the present invention, there is no special limitation on the composition of the cemented carbide or high-speed steel, and cemented carbide or high-speed steel known to those skilled in the art can be used for cutting.
[0032] In the present invention, the deposition of the AlCrN transition layer is preferably h...
Embodiment 1
[0045] Evenly fix the pretreated cemented carbide tool substrate on the bracket, put it into the coating machine, adjust the rotation speed of the workpiece bracket to 2rpm, and pump it to a background vacuum of 1.0×10 -3 Pa, turn on the heater at the same time, raise the temperature to 300°C; open the argon flow valve, adjust the vacuum chamber to about 0.5Pa, apply a negative bias voltage of 800V to the substrate, and perform glow sputtering cleaning for 10min;
[0046] Then reduce the negative bias voltage of the substrate to 300V, turn on the high-power pulse magnetron sputtering pure Cr target, adjust the average current of the target to 2A, the peak current to 400V, the peak voltage to 600V, and the duty cycle to 3%, and bombard the substrate with high-energy Cr ions for 5 minutes to activate the substrate surface;
[0047] Open the nitrogen flow valve, the bias voltage of the substrate is reduced to 100V, the coating pressure is 0.6pa, and the temperature is 300°C, the ...
Embodiment 2
[0054] Evenly fix the pretreated high-speed steel tool base on the bracket, put it into the coating machine, adjust the rotation speed of the workpiece bracket to 8rpm, and pump it to a background vacuum of 5.0×10 -3 Pa, turn on the heater at the same time, and raise the temperature to 500°C;
[0055] Open the argon gas flow valve, adjust the vacuum chamber to about 1.0Pa, apply a negative bias voltage of 1200V to the substrate, and perform glow sputtering cleaning for 30 minutes; then reduce the negative bias voltage of the substrate to 500V, and turn on the high-power pulse magnetron sputtering pure Cr target , adjusting the target average current to 10A, peak current to 800V, peak voltage to 800V, duty cycle to 7%, and high-energy bombardment of the substrate with Cr ions for 15 minutes to activate the surface of the substrate;
[0056] Open the nitrogen flow valve, the substrate bias voltage drops to 150V, the coating pressure is 1.2Pa and the temperature is 500°C, the Al ...
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