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Dual-wavelength phase-shift interference aspheric surface measurement method and device based on partial compensation method

A technology of phase-shift interference and measurement method, which is applied in the field of high-precision measurement of optical aspheric surface error, can solve the problems of increasing the difficulty and cycle of instrument design, shorten the cycle of instrument design, reduce the difficulty and cost of system design, and achieve high The effect of precision reconstruction

Active Publication Date: 2018-03-06
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Summary
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  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For the application of TWPSI to the measurement of steep aspheric surfaces, the chromatic aberration of the compensation mirror and interferometer has always been the key problem to be solved in the practical application of TWPSI. If the achromatic design of the compensation mirror and interferometer is bound to greatly increase the difficulty and cycle of instrument design

Method used

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  • Dual-wavelength phase-shift interference aspheric surface measurement method and device based on partial compensation method
  • Dual-wavelength phase-shift interference aspheric surface measurement method and device based on partial compensation method
  • Dual-wavelength phase-shift interference aspheric surface measurement method and device based on partial compensation method

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Embodiment 1

[0064] Embodiment 1: Large asphericity ellipsoid measurement.

[0065] The implementation device of this embodiment is as figure 2 As shown, the working wavelength λ output by the first laser (1) and the second laser (2) 1 and lambda 2 532nm and 556nm respectively, resulting in an equivalent synthetic wavelength λ eq is 12.325μm, and the maximum measurable difference between adjacent optical path differences is 6.162μm.

[0066] In the present embodiment, the light aperture D of the measured ellipsoid (13) is 580 mm, and the radius of curvature R of the aspheric surface vertex 0 It is -1179.447mm, and the relative diameter of the aspheric surface is D / R 0 is 1 / 2, the maximum asphericity of the measured ellipsoid relative to the vertex sphere and the best reference sphere is 281.85 μm and 67.80 μm respectively, which is an aspheric surface with a relatively large asphericity. The addition of small facet errors to the ellipsoid creates a steep wavefront.

[0067] The glas...

Embodiment 2

[0079] Embodiment 2: Large surface error paraboloid measurement.

[0080] In this embodiment, the measured aspheric surface (13) is a paraboloid with a large surface shape error, its light aperture D is 108mm, and its apex curvature radius R 0 It is -1727.2mm, and the relative diameter of the paraboloid is D / R 0 It is 1 / 16, and the maximum asphericity of the measured paraboloid relative to the vertex sphere and the best reference sphere is 0.206μm and 0.052μm respectively, which is a shallow aspheric surface.

[0081] The glass material of the designed partial compensating mirror (12) for compensating the paraboloid is K9, and the radius of curvature r of the front and rear surfaces 1 and r 2 They are 760mm and -4965mm respectively, and are also a simple biconvex lens. The thickness of the partial compensation mirror (12) is 20mm, and the distance between the partial compensation mirror (12) and the measured aspheric surface (13) is 2985mm.

[0082] Using the method propose...

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Abstract

The invention belongs to the technical field of optical precision testing, and relates to a dual-wavelength phase-shift interference method based on a partial compensation method and an implementationdevice. The method comprises the steps of building a partial compensation method dual-wavelength phase-shift interferometer, and acquiring measured wavefront wrapped phases of two single wavelengths;modeling a partial compensation method dual-wavelength ideal interferometer, and acquiring residual wavefronts and wrapped phases of the two single wavelengths; eliminating known and unknown wavefront variations in the measured wavefront wrapped phases by adopting an error separation and elimination algorithm, and finally optimizing and reconstructing surface-shape error of the measured asphericsurface by adopting reverse iteration. The device comprises a first laser, a second laser, a first slit, a second slit, a first plane mirror, a second plane mirror, a first beam splitter, a second beam splitter, a beam expander, a collimating mirror, a standard plane mirror, a phase shifter, a partial compensating mirror, a measured aspheric surface, an imaging lens and an interferogram acquisition assembly containing a sparse array sensor. The method and device provided by the invention are particularly applicable to processing quality measurement for gradient aspheric surfaces with a small surface-shape error, molded aspheric surfaces with a great surface-shape error and free curved surfaces.

Description

technical field [0001] The invention belongs to the technical field of optical precision testing, and in particular relates to the improvement of a dual-wavelength phase-shifting interference detection method, which is used to realize high-precision measurement of optical aspheric surface shape errors with large asphericity or large surface shape errors. Background technique [0002] Replacing the traditional spherical surface with an aspheric surface can improve the imaging performance of the system with fewer optical elements, and at the same time has the advantages of increasing the degree of design freedom, reducing the volume and reducing the weight of the system. In precision optical systems such as aerospace cameras and astronomical telescopes, the manufacture and testing of certain aspheric surfaces, especially steep optical aspheric surfaces, even play a decisive role in the upgrading of optical systems. However, the high-precision detection of aspheric wavefronts, ...

Claims

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Application Information

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IPC IPC(8): G01B11/24
Inventor 郝群张丽琼胡摇王劭溥李腾飞
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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