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Manufacturing method of aluminum-manganese alloy target material component

A technology of an aluminum-manganese alloy and a manufacturing method, which is applied to metal material coating process, ion implantation plating, coating and other directions, can solve the problem that cracks are prone to occur on the sputtering surface of the target material, the production of target material components is difficult, and the yield is low. problems, to achieve high reliability diffusion welding, improve component production efficiency, and high production yield.

Active Publication Date: 2018-04-13
BAOTOU RES INST OF RARE EARTHS +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Using conventional welding methods, cracks or even cracks are prone to appear on the sputtering surface of the target during the heating and cooling process, making target components difficult and low yield

Method used

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  • Manufacturing method of aluminum-manganese alloy target material component

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] A method for manufacturing an aluminum-manganese alloy target assembly, specifically comprising the following steps:

[0038] (1) prepare aluminum-manganese molding powder;

[0039] An Al-Mn alloy powder with a mass percentage of 65% Al and 35% Mn is prepared, and the average particle size of the powder is 50 μm.

[0040] (2) Prepare backplane powder raw materials;

[0041] Prepare Cu powder with an average particle size of 75 μm.

[0042] (3) Modeling;

[0043] The Al-Mn alloy powder and the Cu powder are loaded into the mold in sequence, the upper layer is the Al-Mn alloy powder, and the lower layer is the Cu powder.

[0044] (4) Hot pressing sintering, diffusion welding: put the mold containing Al-Mn alloy powder and Cu powder into the vacuum hot pressing sintering furnace, and align the upper and lower pressure heads of the hot pressing furnace with the upper and lower pressing heads of the mold The head is pre-compressed, and the compaction pressure is 0.5MPa. ...

Embodiment 2

[0048] A method for manufacturing an aluminum-manganese alloy target component, specifically comprising the following steps:

[0049] (1) prepare aluminum-manganese molding powder;

[0050] Prepare high-purity metal aluminum powder and manganese powder, prepare aluminum-manganese mixed powder according to the mass percentage of 60% Al and 40% Mn, and the average particle size of the powder is 50 μm.

[0051] (2) Prepare backplane powder raw materials;

[0052] Prepare Cu powder with an average particle size of 80 μm.

[0053] (3) Modeling;

[0054] Put the Al-Mn mixed powder and Cu powder into the mold in sequence, the upper layer is the Al-Mn mixed powder, and the lower layer is the Cu powder.

[0055] (4) hot pressing sintering, diffusion welding;

[0056] Put the mold with Al-Mn mixed powder and Cu powder into the vacuum hot pressing sintering furnace, and align the upper and lower pressing heads of the hot pressing furnace with the upper and lower pressing heads of the...

Embodiment 3

[0060] A method for manufacturing an aluminum-manganese alloy target assembly, specifically comprising the following steps:

[0061] (1) prepare aluminum-manganese molding powder;

[0062] Prepare high-purity metal aluminum powder and manganese powder, and prepare aluminum-manganese mixed powder according to the mass percentage of Al 50% and Mn 50%, and the average particle size of the powder is 75 μm.

[0063] (2) Prepare backplane powder raw materials;

[0064] Prepare Cu powder with an average particle size of 90 μm.

[0065] (3) Modeling;

[0066] Put Al-Mn mixed powder and Cu powder into the mold in turn, the upper layer is Cu powder, and the lower layer is Al-Mn mixed powder.

[0067] (4) hot pressing sintering, diffusion welding;

[0068] Put the mold with Al-Mn mixed powder and Cu powder into the vacuum hot pressing sintering furnace, align the upper and lower pressure heads of the hot pressing furnace with the upper and lower pressure heads of the mold for pre-com...

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Abstract

The invention discloses a manufacturing method of an aluminum-manganese alloy target material component. The manufacturing method of the aluminum-manganese alloy target material component comprises the steps that aluminum-manganese forming powder is prepared, the chemical ingredients are aluminum and manganese, the weight percentage of the aluminum is 50%-99%, and the weight percentage of the manganese is 1-50%; a backboard powder raw material is prepared, wherein the backboard powder raw material is Al powder or Cu power; the aluminum-manganese forming powder and the backboard powder raw material are sequentially fed into a mold, the mold is placed in a vacuum hot press sintering furnace, the aluminum-manganese forming powder and the backboard powder raw material are made to make contactin the powder form, through hot press sintering, an aluminum-manganese target material component blank composed of an aluminum-manganese target material blank and a backboard is obtained in a one-offmanner; the aluminum-manganese target material component blank is obtained through furnace cooling, outline machining treatment is conducted on the aluminum-manganese target material component blank,and then the aluminum-manganese target material component is obtained. By the adoption of the manufacturing method, the manufacturing efficiency is high, the manufactured aluminum-manganese target material component is high in surface flatness degree, small in bending deflection and high in welding yield.

Description

technical field [0001] The invention relates to a material processing technology, in particular to a method for manufacturing an aluminum-manganese alloy target component. Background technique [0002] In the magnetron sputtering process, the target structure includes a single target structure, or a composite target assembly composed of a target slab and a back plate with a certain strength. The current welding method of the target assembly is as follows: prepare the back plate profile and the target blank to be welded in advance, weld the target blank to the back plate by brazing or diffusion welding, and then obtain the target assembly by machining. [0003] As a sputtering source for vacuum coating to deposit corrosion-resistant coatings, the Al-Mn alloy target has high brittleness and high hardness. With the conventional welding method, cracks or even cracks are prone to appear on the sputtering surface of the target during the heating and cooling process, making the ta...

Claims

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Application Information

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IPC IPC(8): C23C14/34B22F3/14B22F7/02
CPCB22F3/14B22F7/02B22F2003/145C23C14/3414
Inventor 鲁飞刘树峰刘小鱼李静雅李慧娄树普孙良成辛博王峰李德辉
Owner BAOTOU RES INST OF RARE EARTHS