MEMS deformable mirror driven by multiple layers of planar electromagnetic coils and making method thereof

Abstract

The invention provides an MEMS deformable mirror driven by multiple layers of planar electromagnetic coils and a making method thereof. The MEMS deformable mirror comprises a silicon substrate, multiple layers of coils, a dielectric layer and a deformable mirror surface, wherein the multiple layers of coils are formed on the silicon substrate, and each coil is provided with a pad point and a center point; the dielectric layer covers the multiple layers of coils; the deformable mirror surface of the multiple layers of coils is packaged on the silicon substrate; the deformable mirror surface comprises a reflector layer, a dielectric layer formed on the lower surface of the reflector layer, a Si layer formed in the peripheral area of the lower surface of the dielectric layer and a permanent magnetic material layer formed in a center area of the lower surface of the dielectric layer; the layers of coils are contacted through the pad points and the center points, the multiple layers are sequentially arranged from bottom to top starting from the silicon substrate, an odd number layer and an even number layer of the multiple layers of coils are contacted through the center points, and aneven number layer and an odd number layer are contacted through the pad points; and two welding points interconnected with the outside are formed on the pad point of the first-layer coil and the pad point or the center point of a final-layer coil.

Description

technical field [0001] The invention belongs to the field of micro-optomechanical systems and adaptive optics, and more specifically relates to a MEMS deformable mirror driven by a multilayer planar electromagnetic coil and a manufacturing method thereof. Background technique [0002] In the field of adaptive optics, microelectromechanical system (MEMS) deformable mirrors have become an important field of deformable mirror fabrication due to their advantages of low weight, low cost, compactness, stable process, and easy integration into deformable mirror arrays. The electromagnetically driven MEMS deformable mirror has the advantages of low control voltage, about 1 volt, large deformation of the deformable mirror, up to 50 microns, and linear control, so it is widely used in adaptive optics systems. It is mainly used in applications such as space optical communication, microscope, secondary mirror of astronomical telescope, beam shaping and human retinal imaging, and other o...

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Problems solved by technology

This requires synchrotron radiation X-rays or other high-energy exposure equipment, which requires high technology and increases production costs.

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