Unlock instant, AI-driven research and patent intelligence for your innovation.

A kind of fiber reinforced metal matrix composite material y 2 o 3 Coating Physical Vapor Deposition Method

A technology of physical vapor deposition and composite materials, which is applied in the field of preparation of composite coatings with alternately superimposed Y2O3 phase structures. The effect of stress concentration

Active Publication Date: 2019-11-22
AVIC BEIJING INST OF AERONAUTICAL MATERIALS
View PDF5 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The coating can effectively reduce stress and improve adhesion, and solve the problem of uniform Y 2 o 3 The technical problem that the coating is easy to fall off during the winding or forming process, and the SiC fiber-reinforced nickel-based composite material with a good interface is prepared

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A kind of fiber reinforced metal matrix composite material y <sub>2</sub> o <sub>3</sub> Coating Physical Vapor Deposition Method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] Wind the continuous SiC fiber with C coating on the sample holder, keep the distance between the fibers at 0.5mm, and put it into the sample chamber of the target magnetron sputtering equipment; vacuumize to make the vacuum of the backside better than 8×10-4Pa. Enter Ar gas, maintain pressure 1Pa, bias -2000V, cleaning time 5min, carry out ion cleaning on fiber surface; feed reaction gas oxygen, O2 / Ar ratio 2%, control working pressure 0.8Pa, deposition temperature 500℃; start direct current Sputtering power supply, the deposition rate is 20nm / min, the deposition time is 50min, the control bias is -100V, and the oxygen-deficient monoclinic phase Y2O3-x (0.3≤x≤1) with a thickness of 1μm is prepared; the O2 / Ar ratio is adjusted to 15 %, the deposition rate is 20nm / min, the deposition time is 50min, and other conditions remain unchanged, a cubic phase Y2O3 with a thickness of 1 μm is prepared; the O2 / Ar ratio is adjusted to 2%, the deposition rate is 20nm / min, the depositio...

Embodiment 2

[0034] Wind the continuous SiC fiber with C coating on the sample holder, keep the distance between the fibers at 0.3mm, and put it into the sample chamber of the target magnetron sputtering equipment; Enter Ar gas, keep the pressure 2Pa, bias -1500V, cleaning time 10min, ion cleaning the surface of the fiber; feed the reaction gas oxygen, O2 / Ar ratio 5%, control the working pressure 0.4Pa, deposition temperature 550 ℃; start DC Sputtering power supply, the deposition rate is 60nm / min, the deposition time is 10min, the control bias is -200V, and the oxygen-deficient monoclinic phase Y2O3-x (0.3≤x≤1) with a thickness of 0.6μm is prepared; adjust the ratio of O2 / Ar 60%, the deposition rate is 40nm / min, the deposition time is 10min, and other conditions remain unchanged, the cubic phase Y2O3 with a thickness of 0.4μm is prepared; the O2 / Ar ratio is adjusted to 5%, the deposition rate is 60nm / min, the deposition time is 10min, and other The conditions are unchanged, and the oxygen...

Embodiment 3

[0036] Wind the continuous SiC fiber with C coating on the sample holder, keep the distance between the fibers at 0.3mm, and put it into the sample chamber of the target magnetron sputtering equipment; Enter Ar gas, maintain pressure 2Pa, bias -1500V, cleaning time 10min, carry out ion cleaning on fiber surface; feed reaction gas oxygen, O2 / Ar ratio 50%, control working pressure 0.8Pa, deposition temperature 550 ℃; start DC Sputtering power supply, the deposition rate is 30nm / min, the deposition time is 20min, the control bias is -150V, and the cubic phase Y2O3 with a thickness of 0.6μm is prepared; the O2 / Ar ratio is adjusted to 10%, the deposition rate is 4nm / min, and the deposition time 50min, other conditions remain the same, prepare an oxygen-deficient monoclinic phase Y2O3-x (0.3≤x≤1) with a thickness of 0.2μm; adjust the O2 / Ar ratio to 50%, the deposition rate is 30nm / min, the deposition time is 20min, and other Cubic phase Y2O3 with a thickness of 0.6 μm was prepared u...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
deposition rateaaaaaaaaaa
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
Login to View More

Abstract

The invention relates to a physical vapor phase deposition method for a fiber-reinforced metal based composite material Y2O3 coating. The physical vapor phase deposition method comprises the followingsteps of: winding a continuous SiC fiber with a C coating onto a sample stand, and putting the sample stand into a sample room of magnetron sputtering equipment; performing vacuum pumping for enabling a back bottom vacuum degree to be superior to 8*10<-4> Pa, introducing Ar gas, applying (-)500 to (-)2000 V high bias voltage to the sample stand, and performing ion cleaning on the surface of the fiber; introducing reaction gas, namely oxygen gas, and combining a gate valve to control working pressure intensity; starting a sputtering power supply, and alternatively controlling oxygen gas flow or sputtering bias voltage in a sputtering process to obtain different Y2O3 phases (monoclinic / cubic), thereby realizing a phase structure alternating coating; and switching off sputtering, and coolingto a temperature lower than 50 DEG C under an Ar gas protective environment. A layer interface formed by monoclinic / cubic alternating effectively reduces stress and increases adhesive force; and a prepared SiC fiber-reinforced nick-based composite material with a perfect interface is beneficial for realizing preparing a high-performance fiber-reinforced nick-based composite material.

Description

technical field [0001] The invention relates to the preparation technology of continuous SiC fiber reinforced nickel alloy composite material diffusion barrier coating, specifically a low-stress, high-adhesion Y 2 o 3 Composite coating preparation technology with alternating phase structure (monoclinic / cubic) superposition. Background technique [0002] SiC continuous fiber-reinforced metal composites are considered to be ideal lightweight high-temperature resistant structural materials due to their high specific strength, high specific stiffness, excellent high temperature resistance, creep resistance and fatigue resistance. Significant weight loss achieved. At present, the research on SiC fiber reinforced titanium-based composite materials is relatively mature, and has been used in the preparation of engine compressor blade rings, turbine shafts, etc. The use of SiC fibers to reinforce high-temperature nickel alloys to replace traditional turbine disks will achieve grea...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/08
CPCC23C14/0036C23C14/083C23C14/345C23C14/35
Inventor 黄浩王敏涓李虎黄旭沙爱学李臻熙
Owner AVIC BEIJING INST OF AERONAUTICAL MATERIALS