A spray-free crucible coating for casting polysilicon and its preparation method
A crucible coating, polysilicon technology, applied in the directions of polycrystalline material growth, chemical instruments and methods, crystal growth, etc., can solve the problems of increasing internal defects of silicon ingots, difficult to mix uniformly, polycrystalline silicon impurities and defects, etc., and achieves improved stability. properties and photoelectric conversion efficiency, enhancing strength and density, reducing impurities and defects
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Embodiment 1
[0032] The first layer of coating is prepared, and its composition includes 10% silicon oxynitride, 85% silicon dioxide, and 5% silica sol in terms of mass percentage, wherein the purity of the silicon oxynitride is ≥99%, The purity of the silicon dioxide and the silica sol are both greater than 99.99%.
[0033] Prepare the second layer of coating, by mass percentage, its composition includes 50% silicon oxynitride, 20% silicon dioxide, 20% silicon nitride, 5% silica sol, 5% PVA, wherein The purity of the silicon oxynitride is more than or equal to 99%, the purity of the silicon dioxide, silicon nitride and silica sol is greater than 99.99%, and the degree of alcoholysis of PVA is 98%.
[0034]Prepare the third layer of coating, its composition includes 10% silicon oxynitride, 80% silicon nitride, 5% PVA, 5% PAA in terms of mass percentage, wherein, the purity of the silicon oxynitride ≥99%, the purity of the silicon nitride is greater than 99.99%, the degree of alcoholysis o...
Embodiment 2
[0038] The first layer of coating is prepared, and its composition includes 20% silicon oxynitride, 76% silicon dioxide, and 4% silica sol in terms of mass percentage, wherein the purity of the silicon oxynitride is ≥99%, The purity of the silicon dioxide and the silica sol are both greater than 99.99%.
[0039] Prepare the second layer of coating, by mass percentage, its composition includes 40% silicon oxynitride, 26% silicon dioxide, 26% silicon nitride, 4% silica sol, 4% PVA, wherein The purity of the silicon oxynitride is more than or equal to 99%, the purity of the silicon dioxide, silicon nitride and silica sol is greater than 99.99%, and the degree of alcoholysis of PVA is 98%.
[0040] Prepare the third layer of coating, in terms of mass percentage, its composition includes 20% silicon oxynitride, 72% silicon nitride, 4% PVA, 4% PAA, wherein, the purity of the silicon oxynitride ≥99%, the purity of the silicon nitride is greater than 99.99%, the degree of alcoholysis...
Embodiment 3
[0044] The first layer of coating is prepared, and its composition includes 25% silicon oxynitride, 72% silicon dioxide, and 3% silica sol in terms of mass percentage, wherein the purity of the silicon oxynitride is ≥99%, The purity of the silicon dioxide and the silica sol are both greater than 99.99%.
[0045] Prepare the second layer of coating, by mass percentage, its composition includes 30% silicon oxynitride, 32% silicon dioxide, 32% silicon nitride, 3% silica sol, 3% PVA, wherein The purity of the silicon oxynitride is more than or equal to 99%, the purity of the silicon dioxide, silicon nitride and silica sol is greater than 99.99%, and the degree of alcoholysis of PVA is 98%.
[0046] Prepare the third layer of coating, in terms of mass percentage, its composition includes 25% silicon oxynitride, 69% silicon nitride, 3% PVA, 3% PAA, wherein, the purity of the silicon oxynitride ≥99%, the purity of the silicon nitride is greater than 99.99%, the degree of alcoholysis...
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Abstract
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