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A Method for Controllable Preparation of Structure Gradient Oriented Growth Sb-bi-te Film by Vacuum Evaporation Coating

A sb-bi-te, structural gradient technology, applied in vacuum evaporation plating, sputtering plating, ion implantation plating and other directions, can solve problems such as unseen patents and literature reports, and achieve easy large-scale production, method Simple, significant practical value and economical effect

Inactive Publication Date: 2020-01-21
TIANJIN UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

From what we know, the novel structural gradient directed growth (Bi 0.2 Sb 0.8 ) 2 Te 3 Membrane has no patents and literature reports so far

Method used

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  • A Method for Controllable Preparation of Structure Gradient Oriented Growth Sb-bi-te Film by Vacuum Evaporation Coating
  • A Method for Controllable Preparation of Structure Gradient Oriented Growth Sb-bi-te Film by Vacuum Evaporation Coating
  • A Method for Controllable Preparation of Structure Gradient Oriented Growth Sb-bi-te Film by Vacuum Evaporation Coating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0044] Fabrication of structural gradients (Bi 0.2 Sb 0.8 ) 2 Te 3 membrane:

[0045] (1) the mass percent purity is all 99.99% (Bi 0.2 Sb 0.8 ) 2 Te 3 and Te powder (mass ratio (Bi 0.2 Sb 0.8 ) 2 Te 3 : Te=10:0.8 evenly mixed) pressed under 8MPa pressure (Bi 0.2 Sb 0.8 ) 2 Te 3 and Te mixed material into a block; the (Bi 0.2 Sb 0.8 ) 2 Te 3 and the average particle size of Te powder is less than 50 μm;

[0046] (2) The substrate was ultrasonically cleaned in acetone, absolute ethanol and deionized water for 5 minutes, then taken out, and dried with high-purity 99.999% nitrogen;

[0047] (3) 0.15g of (Bi 0.2 Sb 0.8 ) 2 Te 3 Put the block made of mixed material with Te into the tungsten boat in the vacuum chamber of the vacuum coating machine, place the substrate on the sample stage, and adjust the distance d=4cm between the substrate and the tungsten boat;

[0048] (4) Fill the vacuum chamber with nitrogen for 4 minutes and then stop, then evacuate the ...

Embodiment 2

[0056] Fabrication of structural gradients (Bi 0.2 Sb 0.8 ) 2 Te 3 Membrane: (preferred implementation)

[0057] (1) the mass percent purity is all 99.99% (Bi 0.2 Sb 0.8 ) 2 Te 3 and Te powder (mass ratio (Bi 0.2 Sb 0.8 ) 2 Te 3 : Te=10:1 evenly mixed) pressed under 9MPa pressure (Bi 0.2 Sb 0.8 ) 2 Te 3 and Te mixed material into a block; the (Bi 0.2 Sb 0.8 ) 2 Te 3 and the average particle size of Te powder is less than 50 μm;

[0058] (2) The substrate was ultrasonically cleaned in acetone, absolute ethanol and deionized water for 6 minutes, then taken out, and dried with high-purity 99.999% nitrogen;

[0059] (3) 0.15g of (Bi 0.2 Sb 0.8 ) 2 Te 3 Put the block made of the mixed material with Te into the tungsten boat in the vacuum chamber of the vacuum coating machine, place the substrate on the sample stage, and adjust the distance d=5cm between the substrate and the tungsten boat;

[0060] (4) Fill the vacuum chamber with nitrogen for 5 minutes and ...

Embodiment 3

[0068] Fabrication of structural gradients (Bi 0.2 Sb 0.8 ) 2 Te 3 membrane:

[0069] (1) the mass percent purity is all 99.99% (Bi 0.2 Sb 0.8 ) 2 Te 3 and Te powder (mass ratio (Bi 0.2 Sb 0.8 ) 2 Te 3 : Te=10:1.2 evenly mixed) pressed under 9MPa pressure (Bi 0.2 Sb 0.8 ) 2 Te 3 and Te mixed material into a block; the (Bi 0.2 Sb 0.8 ) 2 Te 3 and the average particle size of Te powder is less than 50 μm;

[0070] (2) The substrate was ultrasonically cleaned in acetone, absolute ethanol and deionized water for 8 minutes, then taken out, and dried with high-purity 99.999% nitrogen;

[0071] (3) 0.18g of (Bi 0.2 Sb 0.8 ) 2 Te 3 Put the block made of mixed material with Te into the tungsten boat in the vacuum chamber of the vacuum coating machine, place the substrate on the sample stage, and adjust the distance d=6cm between the substrate and the tungsten boat;

[0072] (4) Fill the vacuum chamber with nitrogen for 4 minutes and then stop, then evacuate the ...

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PUM

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Abstract

The invention relates to a method for preparing a structural gradient oriented growth Sb-Bi-Te membrane by using vacuum evaporation coating. The method comprises the following steps: (1) evenly mixing(Bi0.2Sb0.8)2Te3 and Te powder (in a mass ratio of 10 to (0.8 to 1.2)), and pressing the mixed material of (Bi0.2Sb0.8)2Te3 and Te under a pressure of 8-10MPa into a block; (2) performing ultrasoniccleaning on a substrate in acetone, absolute ethyl alcohol and deionized water respectively, and blow drying with nitrogen; (3) putting 0.1-0.2g of the block obtained by pressing the mixed material of(Bi0.2Sb0.8)2Te3 and Te into a tungsten boat of a vacuum chamber of a vacuum coating machine; (4) introducing nitrogen into the vacuum chamber for 2-5min; (5) when the vacuum degree reaches 2.0*10<-4> to 5.0*10<-4>Pa, turning on a heating temperature control power supply, and setting the heating temperature at 100-200 DEG C to start heating the substrate; (6) after the temperature rises to the preset temperature 100-200 DEG C, depositing on a PID controller according to the set deposition rate; (7) adjusting the output current to 160-170A; starting the deposition preparation of a structural gradient oriented growth (Bi0.2Sb0.8)2Te3 membrane on the substrate. The method provided by the invention has the advantages of easiness in preparation and remarkable effect.

Description

technical field [0001] The invention relates to a method for controllably preparing a structural gradient Sb-Bi-Te film by physical vapor deposition, in particular to a method for controllably preparing a structural gradient directional growth Sb-Bi-Te film by using vacuum evaporation coating. Background technique [0002] Thermoelectric material is a kind of solid material that can realize mutual conversion between thermal energy and electric energy, which is very suitable for the preparation of micro power supply and local cooling devices. Thermoelectric devices processed with thermoelectric materials are widely used in civilian fields, especially in military and aerospace fields. Not only can use various thermal energy (solar energy, industry, waste heat from automobile exhaust) to realize power generation, but also can be used as active thermal control of military satellites, spacecraft, submarines and miniature military power supply of aircraft. However, the low thermo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/24
CPCC23C14/0623C23C14/24
Inventor 谭明郝延明谢宁秦月婷焦永芳郭婷婷李天晶
Owner TIANJIN UNIV OF SCI & TECH
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