A kind of horizontal rc-igbt device and its preparation method
A device and lateral technology, applied in the field of lateral reverse conduction insulated gate bipolar transistor devices and their preparation, can solve the problems of large turn-on voltage drop, poor diode reverse recovery capability, etc., so as to improve the turn-on voltage drop, improve Latch-up resistance, the effect of improving compromised performance
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Embodiment 1
[0062] This embodiment provides as figure 2 The cell structure of the punch-through lateral SOI RC-IGBT device is shown, and its cell structure includes a substrate electrode 7, a P-type silicon substrate 6, an oxide layer 5, and an N-type silicon drift region 4 stacked sequentially from bottom to top. One side of the N-type silicon drift region 4 has an emitter structure and a gate structure, and the other side of the N-type silicon drift region 4 has a collector structure; the emitter structure includes a metal emitter 1, a P-type Silicon base region 3, P+ silicon contact region 2 and N+ silicon emitter region 8, the P-type silicon base region 3 is located in the N-type silicon drift region 4, and the P+ silicon contact region 2 and N+ silicon emitter region 8 are located side by side in the P The top layer of the type silicon base region 3, the metal emitter 1 is located on the upper surface of the P+ silicon contact region 2 and the N+ silicon emitter region 8; the gate s...
Embodiment 2
[0066] Such as image 3 As shown, the difference of this embodiment compared with Embodiment 1 is: through the change of process steps, the N-type silicon carbide collector short-circuit region 16 is arranged close to the emitter structure, while the P-type silicon collector region 12 is far away from the emitter structure settings.
[0067] In order to reduce the breakover voltage of the traditional lateral RC-IGBT, it is necessary to make the N-type silicon carbide collector short-circuit region 16 after the P-type silicon collector region 12 to increase the electron current resistance. Since there is no voltage foldback phenomenon in the device structure provided by the present invention, the N-type silicon carbide collector short-circuit region 16 can also be made before the P-type silicon collector region 12. At the same time, this improvement can further reduce the reverse operation of the device mode, and optimize the reverse recovery characteristics of the device in r...
Embodiment 3
[0069] Such as Figure 4 As shown, the difference of this embodiment compared with Embodiment 1 is that the depth of the N-type silicon carbide collector short-circuit region 16 is deepened by increasing the implant dose, prolonging the annealing time and other process controls.
[0070] In order to reduce the breakover voltage of the traditional lateral RC-IGBT, the depth of the N-type SiC collector short-circuit region 16 is controlled as shallow as possible to increase the electronic current path resistance. Since there is no voltage foldback phenomenon in the lateral RC-IGBT device provided by the present invention, and for the consideration of reducing the conduction voltage drop during reverse recovery, the depth of the N-type silicon carbide collector short-circuit region 16 can be deepened to further optimize the present invention. Invention of the reverse recovery characteristics of the device in the reverse mode of operation.
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