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A nanosecond laser substrate pretreatment method to improve the bonding performance of boron-doped diamond electrode film substrate

A boron-doped diamond and bonding performance technology, which is applied in the field of nanosecond laser substrate pretreatment to improve the bonding performance of boron-doped diamond electrode film and substrate, can solve problems such as poor bonding performance between coating and substrate, and overcome the limited surface roughening ability. , The effect of fast processing speed and improved coating bonding performance

Active Publication Date: 2020-02-07
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] The purpose of the present invention is to solve the problem of poor bonding performance between the coating and the substrate in the preparation of the existing boron-doped diamond electrode, and to invent a nanosecond laser texturing technology with large surface roughness and controllable micro-size. Uniformly distributed nanosecond laser substrate pretreatment method to improve the bonding performance of boron-doped diamond electrode film substrate

Method used

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  • A nanosecond laser substrate pretreatment method to improve the bonding performance of boron-doped diamond electrode film substrate
  • A nanosecond laser substrate pretreatment method to improve the bonding performance of boron-doped diamond electrode film substrate
  • A nanosecond laser substrate pretreatment method to improve the bonding performance of boron-doped diamond electrode film substrate

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Effect test

Embodiment 1

[0028] 1. Using 1mm thick niobium sheet, simply sand the edge with sandpaper to remove edge burrs, use deionized water to ultrasonically clean for 15 minutes, and then use anhydrous ethanol to ultrasonically clean for 10 minutes to initially remove oil, debris, etc. on the surface of the metal substrate.

[0029] 2. Use low-power nanosecond laser to scan and clean the surface of the substrate to further remove the remaining adherents and oxide layers on the metal surface. In the step, the laser pulse energy is 0.26mJ per pulse, the laser pulse width is 25ns, the laser beam spot diameter is 30μm, the scanning distance is calculated according to the formula to be 15-24μm, 15μm is taken, the scanning speed is 400mm / s, and the pulse frequency is 45kHz. After the nanosecond laser cleaning step, a metallic bright surface was observed on the surface of the niobium substrate.

[0030] 3. Nanosecond laser etching technology is used to process the surface of the metal substrate to ob...

Embodiment 2

[0035] 1. Use a 1mm thick titanium sheet, simply sand the edge with sandpaper to remove edge burrs, use deionized water to ultrasonically clean for 15 minutes, and then use anhydrous ethanol to ultrasonically clean for 10 minutes to initially remove oil and debris on the surface of the metal substrate.

[0036] 2. Use low-power nanosecond laser to scan and clean the surface of the substrate to further remove the remaining adherents and oxide layers on the metal surface. In the step, the laser pulse energy is 0.26mJ per pulse, the laser pulse width is 25ns, the laser beam spot diameter is 30μm, the scanning distance is 15μm of the laser spot diameter, the scanning speed is 400mm / s, and the pulse frequency is 45kHz. After the nanosecond laser cleaning step, a metallic bright surface was observed on the surface of the niobium substrate.

[0037] 3. Nanosecond laser etching technology is used to process the surface of the metal substrate to obtain a textured surface with large ...

Embodiment 3

[0042] 1. Use 2mm thick niobium sheet, simply sand the edge with sandpaper to remove edge burrs, use deionized water to ultrasonically clean for 10 minutes, and then use anhydrous ethanol to ultrasonically clean for 15 minutes to initially remove oil, debris, etc. on the surface of the metal substrate.

[0043] 2. Use low-power nanosecond laser to scan and clean the surface of the substrate to further remove the remaining adherents and oxide layers on the metal surface. In the step, the laser pulse energy is 0.2 mJ per pulse, the laser pulse width is 10 ns, the laser beam spot diameter is 15 μm, the scanning distance is 12 μm, the scanning speed is 300 mm / s, and the pulse frequency is 40 kHz. After the nanosecond laser cleaning step, a metallic bright surface was observed on the surface of the niobium substrate.

[0044] 3. Nanosecond laser etching technology is used to process the surface of the metal substrate to obtain a textured surface with large surface roughness and ...

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Abstract

The invention discloses a method for improving the bonding property of boron-doped diamond coating electrode and a substrate by treating a metal substrate through a nanosecond laser pretreatment technique. The method is characterized by comprising the following main steps: firstly, carrying out ultrasonic pre-cleaning on the metal substrate to remove surface oil stains and debris; secondly, cleaning the surface of the substrate by adopting small power nanosecond laser, then carrying out pretreatment on the surface of the metal substrate by adopting specific laser parameters to obtain a texturewith certain roughness and uniform morphology distribution; thirdly, needing to repeat the nanosecond laser cleaning step to remove a surface oxide layer for a substrate material which easily reactswith air at high temperature; fourthly, putting the substrate obtained by treatment into diamond suspension for carrying out chip implantation and ultrasonic cleaning; finally, putting the treated metal substrate into chemical vapor deposition equipment for preparing boron-doped diamond. The method disclosed by the invention has the advantages of simple process and easiness in operation; in addition, compared with pretreatment methods such as sandblasting and grinding, the bonding property of the film substrate is obviously improved.

Description

technical field [0001] The invention relates to a coating electrode preparation technology, in particular to a method for improving the bonding performance of boron-doped diamond and metal substrates by nanosecond laser pretreatment technology on the surface of boron-doped diamond metal substrates instead of traditional pretreatment techniques, specifically a method for improving Nanosecond laser substrate pretreatment for boron-doped diamond electrode film-substrate bonding properties. Background technique [0002] A large number of researchers have conducted research on the field of sewage treatment in response to the increasingly complex and mixed situation of industrial wastewater and domestic wastewater. Among them, electrochemical advanced oxidation technology has the advantages of wide treatment range, clean energy use, no secondary pollution, high treatment efficiency, and non-selective treatment of organic sewage solutes. It has become a technology with great applic...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/02C23C16/27
CPCC23C16/0263C23C16/0272C23C16/271C23C16/278
Inventor 徐锋许晨辉施莉莉高继业王雪左敦稳
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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