Micro-nano generator based on nano thin film rectangular dipole array and nano PN junction
A nano-film and generator technology, applied in photovoltaic power generation, electrical components, photovoltaic power stations, etc., can solve the problems of limited service life and large size of batteries, achieve high filling factor, reduce light reflection, and eliminate shading effects.
Inactive Publication Date: 2018-08-14
SOUTHEAST UNIV
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Problems solved by technology
However, many applications still only rely on traditional batteries for power, such as lithium polymer batteries, etc.
Traditional batteries have the following defects: First, compared to micro sensors, etc., their volume is relatively large; second, the battery life is limited, and the limited capacity requires replacement or charging after a period of use. This is a serious constraint for sensor networks
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[0018] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings.
[0019] see Figure 1-4 , the present invention proposes a micro-nano generator based on a nano-film rectangular even array and a nano-PN junction. The structure mainly includes a photovoltaic cell part and a thermoelectric energy collection part, both of which are prepared on the same substrate, realizing the monolithic integration of photoelectricity and thermoelectricity.
[0020] A 4-inch N-type silicon wafer is selected as the substrate 1 with a thickness of 350 μm, a crystal orientation of , a resistivity of 10Ω / □, and a minority carrier lifetime greater than 500us. Then prepare the suede surface, adopt a kind of additive suede making optimization process, the volume ratio of HF / HNO in the suede making liquid is 1:2~1:6 (for example, 1:3, 1:4), dispersant is less than 0.1% ( For example, 0.09%, 0.05%, 0.01%), the etching temperature i...
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Abstract
The invention relates to a micro-nano generator based on a nano thin film rectangular dipole array and a nano PN junction; the substrate is an N-type silicon wafer; and suede, an aluminum oxide film,a photoelectric P-type doping region, a photoelectric N-type doping region, a SiO2 isolation layer and a photoelectric electrode are prepared; the photoelectric electrode is connected as shown in picture 3; then, a first silicon nitride isolation layer is prepared and used for isolating the thermoelectric electricity. The thermoelectric part of the micro-nano generator is composed of a thermopileunit; the thermopile unit is composed of a P-type thermoelectric arm and an N-type thermoelectric arm; the thermoelectric arm adopts a periodic nanometer silicon multilayer thin film; the P-type thermoelectric arm and the N-type thermoelectric arm are serially connected by sputtering a metal Ti / Au layer, so as to obtain a thermopile unit structure as shown in picture 4. The silicon-nano thermal conductivity adopted by the generator is far lower than that of a traditional form material, so that the thermoelectric power generation efficiency is greatly improved; and a sustainable green energy source is obtained by utilizing the waste heat generated in the working process of a radio frequency transmitting and receiving assembly and the illumination in the environment through thermoelectric photoelectric energy conversion.
Description
technical field [0001] The invention provides a micro-nano generator based on a nano-film rectangular even array and a nano-PN junction, which belongs to the technical field of micro-electro-mechanical systems (MEMS). Background technique [0002] With the continuous development of wireless communication and MEMS technology, the application range of MEMS such as microelectronic devices, micro sensors and micro energy harvesters is continuously expanding. However, many applications still rely solely on traditional batteries, such as lithium polymer batteries, for power. Traditional batteries have the following defects: First, compared to micro sensors, etc., their volume is relatively large; second, the battery life is limited, and the limited capacity requires replacement or charging after a period of use. For sensor networks, this is a serious constraint. Therefore, the micro-energy harvesting system has become a research hotspot and is developing rapidly, and energy harv...
Claims
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IPC IPC(8): H02S10/30
CPCH02S10/30Y02E10/50
Inventor 廖小平陈友国
Owner SOUTHEAST UNIV