Planar strip-type nano thermoelectric generator for microcontroller

A thermoelectric generator and microcontroller technology, applied in thermoelectric devices, thermoelectric device components, circuits, etc., can solve the problems of memory bandwidth restriction core expansion, high power consumption heat loss, reliability degradation, etc., to improve thermoelectric power generation. The effect of high efficiency, high reliability and compact structure

Inactive Publication Date: 2018-08-21
SOUTHEAST UNIV
View PDF0 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the development of microcontrollers is also facing new challenges, that is, power consumption and memory bandwidth restrict the expansion of the core.
The higher and higher power consumption also brings a lot of heat loss, and at the same time causes the decline of its reliability

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Planar strip-type nano thermoelectric generator for microcontroller
  • Planar strip-type nano thermoelectric generator for microcontroller

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0018] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings.

[0019] see Figure 1-2 , the present invention proposes a planar elongated nanothermoelectric generator for a microcontroller. An N-type silicon substrate 1 is selected, the phosphorus doping concentration is 1.0E15cm-3, and the resistivity is about 2Ωcm. Double-sided polishing is carried out before production, and soaked in 0.55% HF acid solution to remove impurities such as metal particles. Then, a layer of polysilicon with a thickness of 2um is grown by LPCVD, coated with photoresist, and the doping windows of the P-type thermoelectric arm and the N-type thermoelectric arm are photoetched, and the corresponding regions of the polysilicon are respectively doped with N-type phosphorus ions and After P-type boron ion doping, a P-type thermoelectric arm 2 and an N-type thermoelectric arm 3 are formed. Next, spin-coat a layer of polyimide w...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
Diameteraaaaaaaaaa
Login to view more

Abstract

The invention discloses a planar strip-type nano thermoelectric generator for a microcontroller. The substrate is an N-type silicon wafer, and a P-type arm 2 of a thermopile, an N-type arm 3 of the thermopile, polymethyl methacrylate 4, a first silicon nitride isolation layer 5, a metal aluminum connecting wire 6, a second silicon nitride isolation layer 7 and a cooling plate 8 are prepared. A positive electrode and a negative electrode are connected as shown in Figure 2, the P-type thermoelectric arm 2 and the N-type thermoelectric arm 3 are connected through the metal aluminum 6, and in particular, the thermopile is formed by a series of P-type polysilicon nanowire clusters and N-type polysilicon nanowire clusters, and details are seen in local enlargement in Figure 2. Through thermoelectric conversion, thermal dissipation power generated by working of the microcontroller can be recovered; the thermal conductivity of the adopted silicon nano-particles is much lower than that of the traditional material, heat transfer is suppressed while electronic transportation is maintained, the thermoelectric generation efficiency is improved; and finally, the electric energy generated duringthe above process can be provided for low-power consumption equipment near the microcontroller.

Description

technical field [0001] The invention provides a planar elongated nanothermoelectric generator used for a microcontroller, which belongs to the technical field of micro-electro-mechanical systems (MEMS). Background technique [0002] One of the processor revolutions is the application of multi-core and multi-threading. Multi-core is usually used in notebooks and servers, and it has also appeared in the field of microcontrollers for some computing-intensive applications, such as industrial equipment and automotive applications. However, the development of microcontrollers is also facing new challenges, that is, power consumption and memory bandwidth restrict the expansion of the core. The higher and higher power consumption also brings a lot of heat loss, and at the same time causes the decline of its reliability. [0003] According to the Seebeck effect, miniature thermocouples are made of different semiconductor materials. The principle is very simple. As long as there is a...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): H01L35/00H01L35/02
CPCH10N10/80H10N10/00
Inventor 廖小平陈友国
Owner SOUTHEAST UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap