Digital holographic flexible measurement device and method based on fiber bundles

A technology of digital holography and fiber optic bundles, which is applied in the direction of measuring devices, optical devices, and optical testing of flaws/defects, etc. It can solve the problems of limited application range and inflexible movement of ordinary measuring instruments, and achieves wide application range and anti-interference Powerful, fast-response effects

Active Publication Date: 2018-09-21
FUDAN UNIV
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Problems solved by technology

[0003] The technical problem to be solved by the present invention is to provide a high-precision digital holographic flexible measurement device, which is used for defect detection on

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  • Digital holographic flexible measurement device and method based on fiber bundles
  • Digital holographic flexible measurement device and method based on fiber bundles
  • Digital holographic flexible measurement device and method based on fiber bundles

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[0024] The present invention will be described in detail below with reference to the drawings and specific embodiments.

[0025] Such as figure 1 Shown is a schematic diagram of the system structure of the embodiment. The system consists of a tunable laser 1, a coupling lens 2, a fiber isolator 3, a fiber collimator 4, polarizers 5 and 11, a polarization beam splitter 6, a quarter wave plate 7 and 10. Reflecting mirror 8, Galileo beam expanding lens 9, fiber bundle 12, magnifying imaging lens 13, CCD imaging device 14 and computer 15. In the specific implementation process, the tunable laser 1 is used as a light source to first output laser light, which is output by a single-mode fiber, and is directly connected to the fiber isolator 3 and fiber collimator 4 through a fiber connector to become a unidirectional transmission collimation. Beam; then fix the fiber collimator 4, two polarizers 5 and 11, polarization beam splitter 6, two quarter-wave plates 7 and 10, mirror 8, Galilean...

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Abstract

The invention belongs to the technical field of precision optical detection, and in particular relates to a digital holographic flexible measurement device and method based on fiber bundles. A Twyman-Green interference optical path is used to design a small probe. A Galileo telescopic structure expands a beam at a sample to improve the lateral measurement resolution. A tunable laser is used as a light source to realize interference phase shift by wavelength scanning. An interference signal is transmitted by a fiber bundle, and an image is converted by a convex lens into a CCD camera. The inverse diffraction process of optical waves is simulated in a computer, and the three-dimensional image of an original object surface is reconstructed by digital holography. The device of the invention iscompact and flexible, can realize full-area scanning measurement for large-sized workpieces, and can measure the inner surfaces of complex structures such as holes, cavities and slots. The digital holographic reconstruction can overcome the influence of light field diffraction, improves measurement resolution, avoids the precise focusing process of microscopic imaging, and improves the flexibility of real-time measurements.

Description

technical field [0001] The invention belongs to the technical field of precision optical detection, and in particular relates to a device and method for digital holographic flexible measurement. Background technique [0002] With the continuous improvement of the performance of major optoelectronic equipment and precision instruments, the optical functional components are developing in the direction of large size, complex surface shape, high precision and high surface quality. The detection puts forward higher requirements. The complex topography of large-scale surfaces of key components, including roughness and defect detection, requires full-area measurement, which cannot be achieved with traditional precision microscopic instruments. Therefore, how to ensure a large measurement range while performing high-resolution measurement, especially for the measurement of complex structures such as holes, holes, grooves, or internal areas such as closed structures, is a big challe...

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Application Information

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IPC IPC(8): G01B11/24G01B9/02G01B9/023G01N21/88
CPCG01B9/02047G01B9/023G01B11/2441G01N21/8851
Inventor 王媛张祥朝徐敏
Owner FUDAN UNIV
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