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Preparation method of transparent crystal orientation controllable anatase TiO2 nanotube array thin film

A technology of nanotube array and crystal plane orientation, which is applied in nanotechnology, surface reaction electrolytic coating, ion implantation plating, etc., can solve the problems of incomparability and inability to obtain nanotube array film, etc., and achieve simple operation and increase The effect of transfer rate

Inactive Publication Date: 2018-09-28
XINXIANG UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the above methods are not comparable, at the same time, transparent TiO with controllable crystal plane orientation cannot be obtained. 2 nanotube array film

Method used

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  • Preparation method of transparent crystal orientation controllable anatase TiO2 nanotube array thin film
  • Preparation method of transparent crystal orientation controllable anatase TiO2 nanotube array thin film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0019] (1) Cut the ITO conductive glass into ITO conductive glass pieces with a size of 10×33mm, then ultrasonically clean the ITO conductive glass pieces with isopropanol, acetone and anhydrous methanol for 5 minutes, and then dry them with high-purity nitrogen;

[0020] (2) Put the ITO conductive glass sheet into the magnetron sputtering deposition system. Before the sputtering coating starts, first pump the air pressure in the cabin to 10 -3 Below mTorr, then fill the chamber with high-purity argon until the pressure reaches 10mTorr. The power source used is a radio frequency power source. The deposition power is 100W, the substrate temperature is 400°C, and the DC bias voltage is 10V. The deposition reaction is 3h on the ITO conductive glass sheet. Deposit Ti film with (002) crystal plane orientation;

[0021] (3) In the two-electrode system, the Pt electrode is used as the cathode, and the ITO conductive glass sheet deposited with the Ti film is used as the anode for anod...

Embodiment 2

[0024] (1) Cut the ITO conductive glass into ITO conductive glass pieces with a size of 10×33mm, then ultrasonically clean the ITO conductive glass pieces with isopropanol, acetone and anhydrous methanol for 5 minutes, and then dry them with high-purity nitrogen;

[0025] (2) Put the ITO conductive glass sheet into the magnetron sputtering deposition system. Before the sputtering coating starts, first pump the air pressure in the cabin to 10 -3 Below mTorr, then fill the chamber with high-purity argon until the pressure reaches 10mTorr. The power source used is a radio frequency power source. The deposition power is 100W, the substrate temperature is 400°C, and the DC bias voltage is 10V. The deposition reaction is 3h on the ITO conductive glass sheet. Deposit Ti film with (002) crystal plane orientation;

[0026](3) In the two-electrode system, the Pt electrode is used as the cathode, and the ITO conductive glass sheet deposited with the Ti film is used as the anode for anodi...

Embodiment 3

[0029] (1) Cut the ITO conductive glass into ITO conductive glass pieces with a size of 10×33mm, then ultrasonically clean the ITO conductive glass pieces with isopropanol, acetone and anhydrous methanol for 5 minutes, and then dry them with high-purity nitrogen;

[0030] (2) Put the ITO conductive glass sheet into the magnetron sputtering deposition system. Before the sputtering coating starts, first pump the air pressure in the cabin to 10 -3 Below mTorr, then fill the chamber with high-purity argon until the pressure reaches 10mTorr. The power source used is a radio frequency power source. The deposition power is 100W, the substrate temperature is 400°C, and the DC bias voltage is 10V. The deposition reaction is 3h on the ITO conductive glass sheet. Deposit Ti film with (002) crystal plane orientation;

[0031] (3) In the two-electrode system, the Pt electrode is used as the cathode, and the ITO conductive glass sheet deposited with the Ti film is used as the anode for anod...

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Abstract

The invention discloses a preparation method of a transparent crystal orientation controllable anatase TiO2 nanotube array thin film. The preparation method of the transparent crystal orientation controllable anatase TiO2 nanotube array thin film comprises the following steps: depositing a Ti film on ITO conductive glass by a magnetron sputtering deposition process; carrying out anodizing on the Ti film by taking a matrix as an anode and taking a Pt plate as a cathode under the voltage being 40V until the Ti film is transparent; and placing an ITO conductive glass plate deposited with an amorphous TiO2 nanotube array thin film in a tube furnace and carrying out annealing treatment on the ITO conductive glass plate. Transparent TiO2 nanotube array thin films with different crystal orientations can be obtained by carrying out anodizing on the same Ti films under different electrolyte compositions. The prepared monocrystalline anatase TiO2 nanotube array thin film has good photoelectric converting efficiency, and the preparation method is high in controllability, high in efficiency and simple to operate.

Description

technical field [0001] The present invention belongs to TiO 2 The technical field of synthesis of thin film materials, specifically related to a transparent anatase TiO with controllable crystal plane orientation 2 Preparation method of nanotube array thin film. Background technique [0002] Ti sheets are anodized to form highly ordered TiO 2 Nanotube arrays are widely used in many fields, including photocatalysis, solar energy conversion, and biomaterials. TiO 2 The nanotube array film has a consistent tubular structure and grows vertically on the substrate. To optimize TiO 2 The function of nanotube array films in various applications, controlling the morphology of nanotube arrays is one of the most important means. Many new types of TiO 2 Nanotube array structures, such as bamboo-like structures, double-walled structures, and hierarchical structures, have attracted great interest from researchers. Bamboo-shaped TiO 2 The application of nanotube array films in dye...

Claims

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Application Information

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IPC IPC(8): C25D11/26B82Y40/00C23C14/35C23C14/18C23C14/58
CPCC25D11/26B82Y40/00C23C14/185C23C14/35C23C14/58
Inventor 王刘杰潘洪革陈改荣张庆新马志华朱香玉程天乐
Owner XINXIANG UNIV
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