Sensor integrated with oxygen concentration and ultraviolet intensity detection function and detection method thereof

A technology of intensity detection and oxygen concentration, which is applied in the field of sensors, can solve the problems of increased complexity and instability, single structure of multifunctional sensors, existence of combustion or explosion, etc., to achieve environmental friendliness, avoid adverse factors, and eliminate temperature the effect of interference

Inactive Publication Date: 2018-10-12
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the high working temperature makes this type of sensor have the following disadvantages: high power consumption, not conducive to integration, and potential dangers such as combustion or explosion
Commercially available sensors do not involve the integration of oxygen concentration and ultraviolet intensity detection functions, and the existing multifunctional sensors have a single structure, but use circuits to connect multiple single-function sensors together, which increases complexity and instability

Method used

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  • Sensor integrated with oxygen concentration and ultraviolet intensity detection function and detection method thereof
  • Sensor integrated with oxygen concentration and ultraviolet intensity detection function and detection method thereof
  • Sensor integrated with oxygen concentration and ultraviolet intensity detection function and detection method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0045] This embodiment provides a sensor that integrates oxygen concentration and ultraviolet intensity detection functions, such as figure 1 Shown is a schematic structural view of the sensor provided in this embodiment, the sensor includes an insulating base 3, and a first metal shell 4 and a second metal shell 5 installed on the insulating base 3; the first metal shell 4 and the second The metal shell 5 and the insulating base 3 form two mutually independent first chambers and second chambers; the first chamber is provided with a sensitive element 1 and an ultraviolet LED lamp 2, and the first chamber adopts a closed chamber The chamber constitutes the ultraviolet intensity detection unit S1, which is sealed with high-purity nitrogen in this embodiment; the second chamber is also provided with a sensitive element 1 and an ultraviolet LED lamp 2, and the second chamber is formed by a chamber communicating with the outside world to form an oxygen chamber. Concentration detect...

specific Embodiment approach

[0053] As a specific embodiment, the preparation of the zinc oxide (ZnO) nanoparticle film is preferably a spin-coating process, including the following steps:

[0054] Step A: Prepare nano-sized ZnO particles by chemical method;

[0055] Step B: dispersing the nano-sized ZnO particles in absolute ethanol to form a ZnO nano-particle dispersion, wherein the concentration of ZnO nanoparticles is 1-6 mg / ml; the ultrasonic power of the ultrasonic dispersion operation is 90 Hz, and the ultrasonic time is 2 hours ;

[0056] Step C: Apply the ZnO nanoparticle dispersion on the surface of the interdigitated electrode on the substrate by a spin coating process to form a ZnO nanoparticle wet film; the specific operation of the spin coating process is as follows: Treat for 5 seconds under the condition; then process for 20 seconds under the condition of high speed 3000r / min; repeat the above operation to complete 20 to 100 times of spin coating;

[0057] Step D: putting the sensitive e...

Embodiment 2

[0069] Photoelectric performance evaluation of sensitive element 1:

[0070] Adopt American Keithley 4200-SCS type semiconductor characteristic analysis system, the voltage scanning range-5-5V, record respectively the sensitive element 1 that is coated with ZnO nanoparticle film and grows with ZnO nanorod array thin film in the presence of 365nm ultraviolet light (radiation power 5.7mW / cm 2 ) Irradiated and without 365nm UV-irradiated I-V curve change relationship, see the results Figure 6 .

[0071] Depend on Figure 6 It can be seen that the above two sensitive thin films 13 are in ohmic contact with the gold interdigitated electrodes, and the corresponding sensitive elements show obvious ultraviolet light response. When there is no light, the currents of the sensitive elements coated with ZnO nanoparticle film and ZnO nanorod array film under 5V bias are 1.91×10 -8 A and 1.11×10 -4 A; When there is light, the photocurrents of the two under 5V bias are 2.63×10 -4 A an...

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Abstract

The invention relates to a sensor integrated with an oxygen concentration and ultraviolet intensity detection function and a detection method thereof, and belongs to the technical field of sensors. According to the sensor, two same sensitive members are placed in a sealing cavity to serve as an ultraviolet intensity detection unit and another cavity communicated with the outer world to serve an oxygen concentration detection unit respectively, the ultraviolet intensity unit is taken as the reference end of the oxygen concentration detection unit, and the ultraviolet intensity and oxygen concentration of outer environment can be synchronously, rapidly monitored in real time by the sensor by controlling the detection unit to be connected with an external circuit; thermal excitation is replaced with ultraviolet excitation, and therefore the preventing of harmful factors brought by the thermal excitation under the condition of room temperature while the sensor is operated is avoided. Compared with a traditional oxygen sensor, the effective utilization of solar energy by the sensor is facilitated, the sensitive material adopted by the sensor has excellent photoelectric and air-sensitiveperformance, the preparation method of the sensor is simple and low-cost, the sensor can be massively used and is environment-friendly, and the industrial production of sensors is facilitated.

Description

technical field [0001] The invention belongs to the technical field of sensors, in particular to a sensor integrating oxygen concentration and ultraviolet intensity detection functions and a detection method thereof. Background technique [0002] With the changes of the times and the advancement of science and technology, more and more means of transportation such as automobiles, ships, express trains, and airplanes frequently appear in human life. However, while bringing convenience, people also realize that there are serious safety hazards around them, especially air pollution in confined spaces, which directly endangers life. [0003] Oxygen is the most basic element for human beings to maintain life, and it is inseparable from it every moment of life. In clean air, the content of oxygen accounts for about 21%. When its concentration is too low, it will cause difficulty in breathing and even death. Because the human body exhales a large amount of CO 2 The gas will lead...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D21/02G01N27/12G01J1/42
CPCG01D21/02G01J1/429G01N27/127
Inventor 谢光忠张秋平陈春旭杨铂汐杜鸿飞苏元捷杜晓松太惠玲于贺蒋亚东
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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