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Arc ion plating-magnetron sputtering composite deposition high-temperature wear-resisting antifriction AlTiN nano multi-layer coating and preparing method and application thereof

A magnetron sputtering composite and arc ion plating technology, applied in ion implantation plating, coating, sputtering plating, etc., to achieve strong operability, simple preparation method, improved friction and wear resistance and thermal stability Effect

Active Publication Date: 2018-10-23
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to solve the shortcomings and deficiencies of the existing coating tools used for high-speed cutting of cast iron materials, the primary purpose of the present invention is to provide a kind of arc ion plating-magnetron sputtering composite deposition of high-temperature wear-resistant and anti-friction AlTiN nano-multilayer coating

Method used

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  • Arc ion plating-magnetron sputtering composite deposition high-temperature wear-resisting antifriction AlTiN nano multi-layer coating and preparing method and application thereof
  • Arc ion plating-magnetron sputtering composite deposition high-temperature wear-resisting antifriction AlTiN nano multi-layer coating and preparing method and application thereof
  • Arc ion plating-magnetron sputtering composite deposition high-temperature wear-resisting antifriction AlTiN nano multi-layer coating and preparing method and application thereof

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Embodiment 1

[0032] An arc ion plating-magnetron sputtering composite deposition high temperature wear-resistant anti-friction AlTiN nano multi-layer coating, the nano multi-layer coating includes a hard alloy substrate, a metal AlTi bonding layer, an AlTiN transition layer and an AlTiN coating from bottom to top Functional layer; AlTiN functional layer is deposited alternately by arc ion plating AlTiN intermediate layer and magnetron sputtering AlTiN intermediate layer with a modulation ratio of 1:1 to 10:1, and the modulation period range is 5 to 25nm; metal AlTi bonding layer The atomic percentage content of each element in the film is: Al: 50-70 at.%, Ti: 30-50 at. %; the atomic percentage content of each element in the AlTiN transition layer, arc ion plating AlTiN intermediate layer and magnetron sputtering AlTiN intermediate layer All are: Al: 20-28 at.%, Ti: 18-22 at.%, N: 45-55 at.%. The preparation method follows the steps below:

[0033] Polish the cemented carbide substrate, ul...

Embodiment 2

[0037] An arc ion plating-magnetron sputtering composite deposition high temperature wear-resistant anti-friction AlTiN nano multi-layer coating, the nano multi-layer coating includes a hard alloy substrate, a metal AlTi bonding layer, an AlTiN transition layer and an AlTiN coating from bottom to top Functional layer; AlTiN functional layer is deposited alternately by arc ion plating AlTiN intermediate layer and magnetron sputtering AlTiN intermediate layer with a modulation ratio of 1:1 to 10:1, and the modulation period range is 5 to 25nm; metal AlTi bonding layer The atomic percentage content of each element in the film is: Al: 50-70 at.%, Ti: 30-50 at. %; the atomic percentage content of each element in the AlTiN transition layer, arc ion plating AlTiN intermediate layer and magnetron sputtering AlTiN intermediate layer All are: Al: 20-28 at.%, Ti: 18-22 at.%, N: 45-55 at.%. The preparation method follows the steps below:

[0038] Polish the cemented carbide, ultrasonical...

Embodiment 3

[0042] An arc ion plating-magnetron sputtering composite deposition high temperature wear-resistant anti-friction AlTiN nano multi-layer coating, the nano multi-layer coating includes a hard alloy substrate, a metal AlTi bonding layer, an AlTiN transition layer and an AlTiN coating from bottom to top Functional layer; AlTiN functional layer is deposited alternately by arc ion plating AlTiN intermediate layer and magnetron sputtering AlTiN intermediate layer with a modulation ratio of 1:1 to 10:1, and the modulation period range is 5 to 25nm; metal AlTi bonding layer The atomic percentage content of each element in the film is: Al: 50-70 at.%, Ti: 30-50 at. %; the atomic percentage content of each element in the AlTiN transition layer, arc ion plating AlTiN intermediate layer and magnetron sputtering AlTiN intermediate layer All are: Al: 20-28 at.%, Ti: 18-22 at.%, N: 45-55 at.%. The preparation method follows the steps below:

[0043] Polish the cemented carbide, ultrasonical...

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Abstract

The invention belongs to the field of material coatings, and discloses an arc ion plating-magnetron sputtering composite deposition high-temperature wear-resisting antifriction AlTiN nano multi-layercoating and a preparing method and application thereof. An ion source is used for bombarding a cleaned base body surface, firstly, a metal AlTi combination layer is firstly deposited, base body and coating thermal expansion coefficient mismatching can be relieved, and the film-base combination strength is improved; the arc ions are used for sputter deposition of an AlTiN coating with the thicknessranging from 0.5 to 1 micrometer, the coating serves a transition layer, and support is provided for the nano multi-layer structure coating; finally, meanwhile, an arc AlTi target and a magnetic control AlTi target are opened to carry out composite deposition to prepare the AlTiN nano multi-layer function layer; through design of a combination layer, the transition layer and the composite deposition function layer and regulation of process parameters in the coating deposition process, the modulation period is changed, and the AlTiN nano multi-layer coating with the high combination force, lowfriction coefficient, small inner stress and stable performance is prepared on the hard alloy base body.

Description

technical field [0001] The invention belongs to the field of material coatings, in particular to an arc ion plating-magnetron sputtering composite deposition high-temperature wear-resistant and anti-friction AlTiN nano-multilayer coating and its preparation method and application. Background technique [0002] Cast iron is the most widely used cast metal material in modern industrial production. The strength, toughness and wear resistance of ductile cast iron are significantly improved after austempering, and it is the main raw material for the production of auto parts; However, during the processing of these two cast iron materials, there are a series of problems such as high friction between the tool and the workpiece and the tool is easy to chip. At present, the coated tools introduced by domestic and foreign tool manufacturers are mainly TiN-TiCN-Al prepared by CVD technology. 2 o 3 Multi-layer coatings and AlTiN single-layer coatings prepared by PVD technology have n...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32C23C14/35C23C14/18C23C14/06
CPCC23C14/0036C23C14/0641C23C14/18C23C14/325C23C14/35
Inventor 王启民张权吴正涛刘喆人彭滨
Owner GUANGDONG UNIV OF TECH
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