High-performance silicon-based elliptical gate tunneling field effect transistor
A tunneling field effect, high-performance technology, applied in special data processing applications, instruments, calculations, etc., can solve problems such as leakage current rise
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[0025] For the new silicon-based elliptical gate tunneling field effect transistor, we use Sentaurus 3D simulation software to simulate its electrical characteristics.
[0026] Use the Sentaurus Device Edit (SDE) component to create the corresponding structure. In the Sdvice component, the fluid dynamics model of the carrier transport equation, the Fermi Dirac distribution model, the forbidden band narrowing model, and the mobility model (including mobility and High electric field model and mobility and doping concentration model), carrier recombination model (including Shockley recombination, collision ionization correlation recombination and Auger recombination model), adding delocalized band-to-band tunneling model. After adding the above model to simulate, Figure 3 to Figure 8 for the simulation results.
[0027] In the simulated structure, the length of the channel is 40 nm, the length of the source and drain is 10 nm, and the thickness of the substrate oxide layer is ...
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