This application provides a
semiconductor device and a method for manufacturing the same. The
semiconductor device includes a substrate, a source
electrode, a drain
electrode, and a channel structure disposed on one side of the substrate. The channel structure is located between the source
electrode and the drain electrode. The channel structure includes a stack of multiple nanosheets, a gate electrode surrounding the nanosheets, and a cavity. The cavity is located at least between the channel structure and the substrate. The cavity is formed by the channel structure, the source electrode, the drain electrode, and the substrate surrounding the cavity. In other words, the cavity is located below the channel structure, the source electrode, and the drain electrode, without any contacting film
layers, thus forming a fully floating structure. This can significantly improve the
gate control performance of the
semiconductor device, reduce the
subthreshold swing of the
semiconductor device, reduce leakage current and
parasitic capacitance, increase the drive current, and improve the performance of the
semiconductor device.