Repairing method of W target material

A repair method and target material technology, which is applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems that affect the performance of W target material, the service life of products, the inability to repair and reuse, and the low reuse rate. , to achieve consistent three-point bending performance, performance improvement, and high production efficiency

Active Publication Date: 2018-11-16
HEFEI UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Under long-term work consumption, the surface of the target is prone to uneven defects, which will affect the performance of the W target and the service life of the product
Due to the high melting point of W, W targets on the market are generally prepared by powder metallurgy, but the reuse rate is low, and there is no effective way to repair damaged W targets at home and abroad, resulting in defects on the surface of W targets Afterwards, it cannot be repaired and reused, resulting in serious waste of resources and easy to cause heavy metal pollution

Method used

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  • Repairing method of W target material
  • Repairing method of W target material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] In this embodiment, the W target cylindrical ingot of Φ30mm×30mm is repaired, and the specific steps are as follows:

[0030] Step 1. Select a lathe worker to clean the surface of the W target to be repaired to remove impurities and oxide layers, polish it with 1500-grit sandpaper, and then use the Archimedes drainage method to calculate the amount of time to fill the surface of the W target to be repaired. The volume of W powder required for the uneven defect area;

[0031] Weigh the corresponding volume of W powder for subsequent use;

[0032] Step 2. Put the cleaned W target into the graphite mold, then add W powder, and make the W powder on the surface of the W target to be repaired; use a manual hydraulic press to install the graphite mold with the W target and W powder Carry out preloading, the pressure is ~10MPa;

[0033] Step 3. Wrap the graphite mold with ~5mm thick carbon felt at the same height as the graphite mold after pre-pressing, and then place it in t...

Embodiment 2

[0040] In this embodiment, the W target cylindrical ingot of Φ30mm×30mm is repaired, and the specific steps are as follows:

[0041] Step 1. Select a lathe worker to clean the surface of the W target to be repaired to remove impurities and oxide layers, polish it with 1500-grit sandpaper, and then use the Archimedes drainage method to calculate the amount of time to fill the surface of the W target to be repaired. The volume of W powder required for the uneven defect area;

[0042] Weigh the corresponding volume of W powder for subsequent use;

[0043] Step 2. Put the cleaned W target into the graphite mold, then add W powder, and make the W powder on the surface of the W target to be repaired; use a manual hydraulic press to install the graphite mold with the W target and W powder Carry out preloading, the pressure is ~10MPa;

[0044] Step 3. Wrap the graphite mold with ~5mm thick carbon felt at the same height as the graphite mold after pre-pressing, and then place it in t...

Embodiment 3

[0051] In this embodiment, the W target cylindrical ingot of Φ30mm×30mm is repaired, and the specific steps are as follows:

[0052] Step 1. Select a lathe worker to clean the surface of the W target to be repaired to remove impurities and oxide layers, polish it with 1500-grit sandpaper, and then use the Archimedes drainage method to calculate the amount of time to fill the surface of the W target to be repaired. The volume of W powder required for the uneven defect area;

[0053] Weigh the corresponding volume of W powder for subsequent use;

[0054]Step 2. Put the cleaned W target into the graphite mold, then add W powder, and make the W powder on the surface of the W target to be repaired; use a manual hydraulic press to install the graphite mold with the W target and W powder Carry out preloading, the pressure is ~10MPa;

[0055] Step 3. Wrap the graphite mold with ~5mm thick carbon felt at the same height as the graphite mold after pre-pressing, and then place it in th...

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Abstract

The invention discloses a repairing method of a W target material. The repairing method comprises the steps that the to-be-repaired W target material is put into a graphite mould, and then W powder required by repairing is added, and the W powder is made to be located on the to-be-repaired surface of the W target material; and after being pre-pressed, the W target material is put into a spark plasma sintering system to be subjected to sintering connection, so that an uneven defect area on the to-be-repaired surface of the W target material is filled with the W powder, and repairing of the W target material is completed. According to the repairing method of the W target material, an SPS technology is adopted, by selecting appropriate sintering parameters, the defect on the surface of the Wtarget material can be completely repaired, and after being repaired, the W target material is fine in structure and high in density; the problem that after defects are generated on the surface of anexisting W target material, the existing W target material cannot be repaired and reutilized is effectively solved; and the technique is simple, the period is short, the production efficiency is high,and the using cost of the W target material can be reduced substantially.

Description

technical field [0001] The invention belongs to the field of powder metallurgy, and in particular relates to a method for repairing a tungsten target. Background technique [0002] As a representative of refractory metal targets, W targets are widely used in electronics and information industries, such as integrated circuits, information storage, liquid crystal displays, laser memories, electronic control devices, etc.; they can also be used in the field of glass coating; they can also be used Used in wear-resistant materials, high temperature corrosion resistance, high-end decorative products and other industries. Its working principle is to add an orthogonal magnetic field and an electric field between the sputtered target (cathode) and the anode, and fill the high vacuum chamber with the required inert gas (usually Ar gas). Under the action of the electric field, Ar gas is ionized into positive ions and electrons. A certain negative high voltage is added to the target. T...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B22F7/06B22F3/105C23C14/34
CPCB22F3/105B22F7/062B22F2003/1051B22F2007/068C23C14/3414
Inventor 张久兴高思远赵晶晶潘亚飞杨新宇
Owner HEFEI UNIV OF TECH
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