Workpiece with high-density nano-diamond thin film on surface, and preparation method of high-density nano-diamond thin film

Abstract

The invention provides a preparation method of a high-density nano-diamond thin film. The preparation method comprises the steps that a workpiece substrate is subjected to surface pretreatment to enable the surface of the workpiece substrate to be positively charged or negatively charged; lysine is added into water to obtain a lysine solution, then nano-diamond powder is added into the lysine solution, and nano-diamond suspension liquid with the positively or negatively charged nano-diamond particle surface is obtained after ultrasonic dispersion; the workpiece substrate subjected to surface pretreatment is immersed into the nano-diamond suspension liquid with the opposite charge to the workpiece substrate, and ultrasonic oscillation is conducted, so that nano-diamond particles are adsorbed on the surface of the workpiece substrate; and after adsorption is completed, the workpiece substrate is taken out, cleaned and blow-dried through nitrogen, and then the diamond thin film is grown on the workpiece substrate through chemical vapor deposition equipment. According to the preparation method, the large-area nanometer-thickness high-density nano-diamond thin film can be prepared on acomplex workpiece, the thin film is high in quality and high in bonding force, the technology is simple, the cost is low, and the preparation method has broad application prospects in a nano-electromechanical system.

Description

technical field

[0001] The invention relates to the technical field of nano-diamonds, in particular to a workpiece with a high-density nano-diamond film on the surface and a preparation method of the high-density nano-diamond film. Background technique

[0002] Due to its high melting point, high thermal conductivity, high hardness, good insulation, strong corrosion resistance, small dielectric constant, wide-bandgap semiconductor characteristics and good chemical stability, diamond film is used in wear-resistant coatings, biological Many high-tech fields such as medicine, thin-film microsensors, and nano-electromechanical systems have broad application prospects. At present, in order to obtain high-quality diamond films, diamond nano-powders are usually used to coat and pre-treat the substrate to increase the nucleation density of diamond films in different substrate materials. Form size constraints are a big problem. In addition, in nano-electromechanical systems, the th...

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