A preparation method of an anti-PID double-sided PERC solar cell
A solar cell, double-sided technology, applied in circuits, photovoltaic power generation, electrical components, etc., can solve the problems of complex POE packaging process, different packaging materials, incompatibility, etc., achieve strong resistance to impurity diffusion and water vapor penetration, and low cost , the effect of improving efficiency
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[0018] The present invention will be further described below through specific embodiments, but the present invention is not limited to the following specific embodiments.
[0019] A method for preparing an anti-PID double-sided PERC solar cell comprises the following steps.
[0020] (1) Wafer cutting and material preparation;
[0021] (2) Remove the damaged layer;
[0022] (3), cashmere;
[0023] (4), diffusion knot;
[0024] (5), edge etching and cleaning;
[0025] (6) Deposit silicon nitride film on the front side;
[0026] (7) Aluminum oxide film is deposited on the back;
[0027] (8) Deposit silicon oxynitride film on the back;
[0028] (9) Deposit silicon nitride film on the back;
[0029] (10) Laser slotting on the back;
[0030] (11), screen printing upper and lower electrodes;
[0031] (12) Co-firing to form metal contact.
[0032] Wherein step (8) when depositing silicon oxynitride film on the back, set NH 3 with SiH 4 The gas flow ratio is 0.7-1.8; NH 3 ...
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