HTCC system-level package structure and package method of flip chip
A system-level packaging and packaging structure technology, which is applied in the manufacturing of electrical components, electrical solid-state devices, semiconductor/solid-state devices, etc., can solve the problems of inability to meet complex system circuit integration, damage to the atmosphere inside the sealed cavity, and affect chip reliability. , to achieve broad market application prospects, improve system integration, and protect reliability.
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[0027] A method for preparing a flip chip HTCC system-in-package structure. The steps of the method include:
[0028] (1) To prepare the HTCC substrate 1, the length and width of the HTCC substrate 1 shall be 35-60mm, the thickness shall be 2-4mm, and the flatness of the flip chip mounting area shall not be greater than 30μm;
[0029] (2) To prepare the upper cavity enclosure frame 2 and the lower cavity enclosure frame 4, the height of the upper cavity enclosure frame 2 is 1.5-3mm, the height of the lower cavity enclosure frame 4 is 1.5-2mm; the upper cavity enclosure frame 2 and the lower cavity enclosure frame 4 have a wall thickness of 1-2mm, and the upper cavity enclosure frame 2 and the lower cavity enclosure frame 4 are made of Kovar alloy;
[0030] (3) Prepare the upper cavity cover 3 and the lower cavity cover 5, the upper cavity cover 3 and the lower cavity cover 5 are made of Kovar alloy, the upper cavity cover 3 and the lower cavity cover The thickness of the plate 5 is ...
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[0037] Such as figure 2 with image 3 As shown, a flip chip HTCC system-in-package structure includes an HTCC substrate 1, an upper cavity enclosure frame 2, an upper cavity cover plate 3, a lower cavity enclosure frame 4, and a lower cavity cover plate 5. CGA pin array 6 and heat sink 7;
[0038] The heat sink 7 and the upper cavity cover plate 3 are placed side by side on the upper surface of the HTCC substrate 1. Between the HTCC substrate 1 and the heat sink 7 is the mounting area for the flip-chip chip. Between the HTCC substrate 1 and the upper cavity cover plate 3 The upper cavity enclosure frame 2 is installed between the HTCC substrate 1, the upper cavity cover plate 3 and the upper cavity enclosure frame 2 to form a closed cavity; the CGA pin array 6 has a cavity in the center, and the lower cavity The cover plate 5 is installed in the central cavity of the CGA pin array 6. The CGA pin array 6 and the lower cavity cover plate 5 are located on the lower surface of the ...
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